Electron Channelling Contrast Imaging (ECCI) of Dislocations in Bulk Specimens

Abstract

Dislocations have been imaged in bulk specimens of Si using a FEG SEM operating at 30keV and 100keV, without using an energy filter, but by image processing of the back scattered electron signal collected by a highly efficient detector. The dislocation contrast is greater at 30 keV than at 10OkeV. Ilowever, the depth to which useful information may be obtained is greater at 1O0keV (∼210nm) than at 3OkeV (∼95nm). The final depth to which dislocations can be imaged is strongly dependent on image processing conditions.

This is a preview of subscription content, access via your institution.

References

  1. [1]

    P. Morin, M. Pitaval, D. Besnard and G. Fontaine, Phil. Mag., 40, 511 (1979).

    CAS  Article  Google Scholar 

  2. [2]

    J.T. Czcrnuszka, N.J. Long, E.D. Boyes and P.B. Hirsch, Phil. Mag. Letts. 62,227 (1990).

    Article  Google Scholar 

  3. [3]

    J.T. Czernuszka, N.J. Long and P. B. Hirsch, in Proc. XIIth International Congress on Electron Microscopy Vol. 4 p.410 (1990).

    Google Scholar 

  4. [4]

    D.R. Clarke and A. Howie, Phil. Mag. 24, 259 (1971).

    Article  Google Scholar 

  5. [5]

    J.P. Spencer, C.J. Humphreys and P.B. Hirsch, Phil. Mag., 26193 (1972).

    CAS  Article  Google Scholar 

  6. [6]

    G. Fontaine, P. Morin, and M. Pitaval, Inst. Phvs. Conf. Ser. no.67: section 4, p. pp{213} (1987)

Download references

Acknowledgement

SERC are thanked for funding and for a Research Fellowship to one of us (JTC). T.Fell prepared the silicon sample and J. Stead helped with the construction of the detector.

Author information

Affiliations

Authors

Corresponding author

Correspondence to J. T. Czernuszka.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Czernuszka, J.T., Long, N.J., Boyes, E.D. et al. Electron Channelling Contrast Imaging (ECCI) of Dislocations in Bulk Specimens. MRS Online Proceedings Library 209, 289–292 (1990). https://doi.org/10.1557/PROC-209-289

Download citation