Effect of Nitrous Oxide Gas on Cvd Diamond Film Deposition

Abstract

The addition of nitrous oxide (N2O) gas in the hot-filament chemical vapor deposition of carbon film from mixtures of methane and hydrogen was found to increase remarkably the content of diamond structure in the film. Increased particle size and crystal orientation parallel to the (111) direction were also obtained by the N2O addition. Mass spectrometry revealed that the vapor phase reaction was scarcely affected by the N2O addition.

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Correspondence to H. Koinuma.

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Koinuma, H., Yoshimoto, M., Takagi, Y. et al. Effect of Nitrous Oxide Gas on Cvd Diamond Film Deposition. MRS Online Proceedings Library 180, 861 (1990). https://doi.org/10.1557/PROC-180-861

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