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Effect of Nitrous Oxide Gas on Cvd Diamond Film Deposition

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Abstract

The addition of nitrous oxide (N2O) gas in the hot-filament chemical vapor deposition of carbon film from mixtures of methane and hydrogen was found to increase remarkably the content of diamond structure in the film. Increased particle size and crystal orientation parallel to the (111) direction were also obtained by the N2O addition. Mass spectrometry revealed that the vapor phase reaction was scarcely affected by the N2O addition.

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Authors and Affiliations

  1. Research Laboratory of Engineering Materials, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, 227, Japan

    H. Koinuma, M. Yoshimoto, Y. Takagi & A. B. Sawaoka

  2. Department of Industrial Chemistry, Faculty of Engineering, Tokyo University, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113, Japan

    T. HaHashimoto

  3. Department of Communications, Faculty of Engineering, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa, 259-12, Japan

    T. Nagai & T. Shiraishi

Authors
  1. H. Koinuma
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  2. M. Yoshimoto
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  3. Y. Takagi
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  4. A. B. Sawaoka
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  5. T. HaHashimoto
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  6. T. Nagai
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  7. T. Shiraishi
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Koinuma, H., Yoshimoto, M., Takagi, Y. et al. Effect of Nitrous Oxide Gas on Cvd Diamond Film Deposition. MRS Online Proceedings Library 180, 861 (1990). https://doi.org/10.1557/PROC-180-861

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  • DOI: https://doi.org/10.1557/PROC-180-861

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