DC Plasma Synthesis of Aluminum Nitride Ceramic Powders


A novel Triple DC Torch Plasma Reactor (TTPR) has been developed for the plasma synthesis of fine ceramic powders. The reactor consists of three identical plasma torches. The plasma jets from these torches form a converging plasma volume into which the starting powder is fed. Thermodynamic equilibrium calculations have been performed for predicting the behavior of an aluminum-nitrogen system. Aluminum nitride has been synthesized by using the TTPR operating in the non-transferred mode. Product characterizations indicate that single hexagonal phase AIN ceramic powder has been obtained.

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Correspondence to Z. P. Lu.

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Lu, Z.P., Pfender, E. DC Plasma Synthesis of Aluminum Nitride Ceramic Powders. MRS Online Proceedings Library 180, 857 (1990). https://doi.org/10.1557/PROC-180-857

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