The structure of sol-gel derived silica coatings was investigated using nanoindentation. chemical etching. and cross-sectional TEM. For coatings heated at 100°C. the surfaces were harder, etched slower, and appeared less porous than the interior of the coatings. For samples fired at higher temperatures (400–800°C). the surfaces remained harder and etched slower than the interior. even though the porosity appeared to be evenly distributed throughout the thickness of the coating. It is proposed that this difference is due to inhomogeneities on two scales in the coatings: bulk porosity and skeletal strain.
This is a preview of subscription content, access via your institution.
Buy single article
Instant access to the full article PDF.
Tax calculation will be finalised during checkout.
B.D. Fabes and W.C. Oliver, to be published in J. Non-Ccyst. Sol.. (1990).
W.C. Oliver. MRS Bulletin. 11. (5) 15–19 (1986).
J.B.Pethica and W.C. Oliver, pp. 13–23 in Thin Films: Stresses and Mechanical Properties. edited by C. Bravman. W. Nix. D. Barnett. and D. Smith Mater. Res. Soc. Proc. 130. Pittsburgh. PA. (1989).
M.F. Doerner. and W.D. Nix. J. Mater. Res. 1. 601–609 (1986).
B.D. Fabes and W.C. Oliver, to be published in Proceedings of Symposium K of the Spring Meeting of the Materials Research Society. San Francisco, Ca. 1990.
K.D. Cornett. B.D. Fabes, and W.C. Oliver, to be published in Proceedings of Symposium K of the Spring Meeting of the Materials Research Society. San Francisco. Ca. 1990.
W.A. Pliskin, J. Vac. Sci. Tech.. 14 (5) 1064–1081 (1977).
A. Paneva and I. Ohlidal. Thin Solid Films. 145. 23–27 (1986).
T. Easwarakjanthan. C. Michel. and S. Ravelet. Surface Science. 197. 339–345 (1988).
G.H. Bu-abbud. N.M. Basura, and J.A. Woodlam. Thin Solid Films. 138. 27–41 (1986).
J.T. Fitch. C.H. Bjorkman. J.J. Summakeris, and G. Lucovsky, pp. 289–294 in Thin Films: Stresses and Mechanical Properties. edited by C. Bravman. W. Nix. D. Barnett. and D. Smith. Mater. Res. Soc. Proc. 130. Pittsburgh. PA. (1989).
L. Weisenbach. D.L. Klein. B.J.J. Zelinski, and B.D. Fabes. these Proceed ings.
G.W. Scherer. J. Non-Cryst. Sol.. 89. 217–238 (1987).
C.J. Brinker. D.R. Tallant. E.P. Roth, and C.S. Ashley. J. Non-Cryst. Sol. 82 117–126 (1986).
B.D. Fabes and D.R. Uhlmann. J. Amer. Ceram. Soc.. 73 (4) 978–988 (1990).
About this article
Cite this article
Fabes., B.D., Klein., D.L. & Raymond, L.J. Inhomogeneities In Sol-Gel Coatings. MRS Online Proceedings Library 180, 605 (1990). https://doi.org/10.1557/PROC-180-605