Grazing angle ion-beam milling of c-axis oriented YBa2Cu3O7 films is shown to give smooth films which have metallic-like resistance transitions and superconduct at thicknesses approaching a lattice constant. The zero resistance transition temperature decreases uniformly with increased milling with most of the change occurring for thicknesses less than 100Å. The crossover to non-superconducting behavior occurs at “electrical” thicknesses near 10 Å with a sheet resistance above the onset of the superconducting transition having a value near h/4e2 = 6450Ω, a combination of fundamental constants predicted by theory and observed previously in low-Tc superconductors. Continued milling beyond this limit results in semiconducting behavior without a superconducting transition.
This is a preview of subscription content, access via your institution.
Buy single article
Instant access to the full article PDF.
Tax calculation will be finalised during checkout.
A. F. Hebard, R. M. Fleming, K. T. Short, A. E. White, C. E. Rice, A. F. J. Levi, and R. H. Eick, Appl. Phys. Lett. 55, 1915(1989).
A. F. Hebard, T. Siegrist, E. Coleman, and R. H. Eick, SPIE Symposium on Processing of Films for High Tc Superconducting Electronics, Oct 1989, Santa Clara, CA (to be published SPIE Proceedings, Vol. 1187).
E. Coleman, T. Siegrist and J.J. Yeh, J. Electronic Mater., in press
H. M. Jaeger, D. B. Haviland, B. G. Orr, and A. M. Goldman, Phys. Rev. B 40, 182(1989).
A. F. Hebard and M. A. Paalanen, Phys. Rev. Lett. 54, 2155(1985).
J. M. Valles, Jr., A. E. White, K. T. Short, R. C. Dynes, J. P. Garno, A. F. J. Levi, M. Anzlowar, and K. Baldwin, Phys. Rev. B 39, 11599(1989).
About this article
Cite this article
Hebard, A.F., Eick, R.H., Siegrist, T. et al. Ion Beam Thinning of YBa2cu3o7 Films: Approach to a Limiting Thickness for Superconductivity of One Lattice Constant. MRS Online Proceedings Library 169, 565–568 (1989). https://doi.org/10.1557/PROC-169-565