We fabricated the multi layered structure with Au gate electrode/polymer film/Bi-Sr-Ca-Cu-O film to study the electric-field control of high Tc superconductor. A Bi-Sr-Ca-Cu-O(BSCCO) film was fabricated using an ion beam sputtering technique. The plasma polymerization using trif luoroethane gas was used to make the gate insulator. The patterning of the BSCCO film was carried out using an ion beam etching technique. The supercurrent of the structure decreased when the gate voltage was applied to the gate electrode.
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Morohashi, S., Suzuki, H., Gotoh, K. et al. Electric-field modulation of a Bi-Sr-Ca-Cu-O film with a polymer film as an insulator. MRS Online Proceedings Library 169, 1181–1184 (1989). https://doi.org/10.1557/PROC-169-1181