Purity and Uv Absorption Cross Sections of TMA, TMG, and TMAs


Vapor pressures of commercial electronic grade TMA,.TMG and TMAs samples have been measured at various temperatures and compared with those of known pure samples. Only TMA showed the presence of impurities. The UV absorption spectrum of impure TMA shows toluene to be an impurity. The UV absorption cross sections of TMA, TMG and TMAs have been measured and tabulated at several wavelengths.

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  1. [1]

    Group III-V compounds by I.R. Grant in”The chemistry of the semiconductor industry, Ed. S.J. Moss and A. Ledwith, Chapman and Hall, New York 1986

    Google Scholar 

  2. [2]

    J.M. Olson, S.R. Kurtz, and A.E. Kibbler, J. Crystal Growth, 89, 131(1988)

    CAS  Article  Google Scholar 

  3. [3]

    Electronic chemicals in Alfa Catalog, Morton Thiokol, Inc., 152 Andover St. Danvers, MA ∅1923, 1986–87

  4. [4]

    P.J. Baugh, A. Casson, M.W. Jones, and A.C. Jones, Chemtronics, 2 (1987) 93

    CAS  Google Scholar 

  5. [5]

    J.I. Davies, R.C. Goodfellow and J.O. Williams, J.Crystal Growth, 68(1984) 1∅

    CAS  Article  Google Scholar 

  6. [6]

    M. Fischer, R. Luckerath, P. Balk and W. Richter, to be published in Chemtronics

  7. [7]

    V.R. McCrary and V.M. Donnelly, J.Crystal Growth, 84(1987)253

    CAS  Article  Google Scholar 

  8. [8]

    G.S. Higashi and L.J. Rothberg, J.Vac.Sci.Technol., Β 3.1460(1985)

    Article  Google Scholar 

  9. [9]

    Η.Η Gilgen, C.J. Chen, R. Krchnavek, R.M. Osgood, Jr., in Laser processing and diagnostics, Springer Series in Chemical Physics, 39, Ed. D. Bauerle, Springer, Berlin(1984),p.225

    Google Scholar 

  10. [10]

    H. Itoh, M. Watanabe, S. Mukai and H.Yajima, J. Crystal Growth, 93 (1988) 165

    CAS  Article  Google Scholar 

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Correspondence to Hideo Okabe.

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Okabe, H., Emadi-Babaki, M.K. Purity and Uv Absorption Cross Sections of TMA, TMG, and TMAs. MRS Online Proceedings Library 145, 187–192 (1989). https://doi.org/10.1557/PROC-145-187

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