Purity and Uv Absorption Cross Sections of TMA, TMG, and TMAs

Abstract

Vapor pressures of commercial electronic grade TMA,.TMG and TMAs samples have been measured at various temperatures and compared with those of known pure samples. Only TMA showed the presence of impurities. The UV absorption spectrum of impure TMA shows toluene to be an impurity. The UV absorption cross sections of TMA, TMG and TMAs have been measured and tabulated at several wavelengths.

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Correspondence to Hideo Okabe.

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Okabe, H., Emadi-Babaki, M.K. Purity and Uv Absorption Cross Sections of TMA, TMG, and TMAs. MRS Online Proceedings Library 145, 187–192 (1989). https://doi.org/10.1557/PROC-145-187

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