The Berkeley Atomic Resolution Microscope – an Update

Abstract

Recent modifications to the JEOL ARM-1000 microscope have markedly enhanced its performance. The point resolution limit at 1000kV is confirmed by optical diffractograms down to 1.7Å and there are firm indications of contrast transfer down to 1.4Å. The unique tilting capability of the ARM, ±40° biaxial tilt over the 800kV to 1000kV range, is preserved at this resolution. This paper presents the measured imaging parameters and results of resolution tests.

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Correspondence to C. J. D. Hetherington.

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Hetherington, C.J.D., Nelson, E.C., Westmacott, K.H. et al. The Berkeley Atomic Resolution Microscope – an Update. MRS Online Proceedings Library 139, 277–282 (1988). https://doi.org/10.1557/PROC-139-277

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