Steady-state and time resolved molecular beam sampling mass spectrometry have been used to study the ArF excimer laser induced photochemistry of silaneammonia mixtures at 193 nm. Under both steady state and single laser shot conditions, products as complicated as tetraaminosilane are formed promptly. A mechanism which accounts for the formation of all observed products is proposed and evaluated.
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Jasinski, J.M., Beach, D.B. & Estes, R.D. Excimer Laser Induced Photochemistry of Silane-Ammonia Mixtures. MRS Online Proceedings Library 131, 501 (1988). https://doi.org/10.1557/PROC-131-501