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Infrared Spectroscopy of Si(111) and Si(100) Surfaces After HF Treatment: Hydrogen Termination and Surface Morphology

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The methodology for extracting structural information from surface infrared spectra is exemplified by considering the silicon-hydrogen stretching modes of flat and vicinal Si(111) and Si(100) surfaces obtained after HF treatment.

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References

  1. T. M. Buck and F. S. McKim, J. Electrochem. Soc. 105, 709 (1958).

    Article  CAS  Google Scholar 

  2. W. Kern, Semicond. Int. 94 (April 84).

  3. E. Yablonovitch, D. L. Allara, C. C. Chang, T. Gmitter, and T. B. Bright, Phys. Rev. Lett. 57, 249 (1986).

    Article  CAS  Google Scholar 

  4. M. Grundner and R. Schultz, in Deposition and Growth Limits for Microelectronics, edited by G. W. Rubloff, AIP Conf. Proc. No 167 (American Institute of Physics, New York, 1988) pp 329–337; Am. Vac. Soc. Ser. No4 (AVS, Anaheim, 1988).

  5. V. A. Burrows, Y. J. Chabal, G. S. Higashi, K. Raghavachari, and S. B. Christman, Appl. Phys. Lett. 53, 998 (1988).

    Article  CAS  Google Scholar 

  6. Y. J. Chabal, G. S. Higashi, K. Raghavachari, and V. A. Burrows, J. Vac. Sci. Technol (May/June 1989).

  7. N. J. Harrick, Internal Reflection Spectroscopy (Wiley, N.Y., 1967) (Second printing: Harrick, Ossining, 1979).

  8. Y. J. Chabal, Surf. Sci. Repts 8, 211 (1988).

    Article  CAS  Google Scholar 

  9. ibid, p. 265 and Y. J. Chabal in Chemistry and Physics of Solid Surfaces, edited by R. Vanselow and R. F. Howe, Springer Series in Surfaces Sciences, vol. 10 (Springer, Berlin, 1988) pp. 109ff.

  10. Y. J. Chabal and K. Raghavachari, Phys. Rev. Lett. 53, 282 (1984); ibid 54, 1055 (1985).

    Article  Google Scholar 

  11. K. Raghavachari, J. Chem. Phys. 81, 2717 (1984).

    Article  CAS  Google Scholar 

  12. S. A. Joyce, J. A. Yarmoff, A. L. Johnson, and T. E. Madey, MRS Proceedings (This volume).

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Chabal, Y.J., Higashi, G.S. & Raghavachari, K. Infrared Spectroscopy of Si(111) and Si(100) Surfaces After HF Treatment: Hydrogen Termination and Surface Morphology. MRS Online Proceedings Library 131, 191 (1988). https://doi.org/10.1557/PROC-131-191

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  • DOI: https://doi.org/10.1557/PROC-131-191

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