Infrared Spectroscopy of Si(111) and Si(100) Surfaces After HF Treatment: Hydrogen Termination and Surface Morphology

Abstract

The methodology for extracting structural information from surface infrared spectra is exemplified by considering the silicon-hydrogen stretching modes of flat and vicinal Si(111) and Si(100) surfaces obtained after HF treatment.

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Chabal, Y.J., Higashi, G.S. & Raghavachari, K. Infrared Spectroscopy of Si(111) and Si(100) Surfaces After HF Treatment: Hydrogen Termination and Surface Morphology. MRS Online Proceedings Library 131, 191 (1988). https://doi.org/10.1557/PROC-131-191

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