Studies of Si Surface Chemistry and Epitaxy Using Scanning Tunneling Microscopy and Spectroscopy


We apply scanning tunneling microscopy (STM) and spectroscopy (STS) to study the reaction of NH3 with Si(111)-(7×7), and the epitaxial growth of CaF2 on Si(11). By a combination of topographs and atom-resolved spectra we can follow the spatial distribution of the reaction and changes in electronic structure with atomic resolution. We find that there are strong site-selectivities for the NH3 reaction on the 7×7 surface. We also observe the initial stages of the CaF2 deposition and even are able to image insulating multi-layer CaF2 films.

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  1. 1.

    For reviews see: G. Binnig and H. Rohrer, Rev. Mod. Phys. 59, 615 (1987); P. K. Hansma and J. Tersoff, J. Appl. Phys. 61, R1 (1987).

  2. 2.

    K. Takayanagi, Y. Tamishiro, M. Takahashi, H. Motoyoshi, and K. Yagi, J. Vac. Sci. Technol. A3, 1502 (1985).

    Article  Google Scholar 

  3. 3.

    R. Wolkow and Ph. Avouris, Phys. Rev. Lett. 60, 1049 (1988); Ph. Avouris and R. Wolkow, Phys. Rev. B, to be published.

  4. 4.

    R. M. Feenstra, J. A. Stroscio and A. P. Fein, Surf. Sci. 181, 295 (1984).

    Article  Google Scholar 

  5. 5.

    J. E. Northrup, Phys. Rev. Lett. 57, 154 (1986).

    CAS  Article  Google Scholar 

  6. 6.

    S. Tanaka, M. Onchi and M. Nishijima, Surf. Sci. L756, (1987).

  7. 7.

    F. Bozso and Ph. Avouris, Phys. Rev. B38, 3937 (1988).

    Article  Google Scholar 

  8. 8.

    R. M. Tromp and M. C. Reuter, Phys. Rev. Lett. 61, 1756 (1988).

    CAS  Article  Google Scholar 

  9. 9.

    D. Rieger, F. J. Himpsel, V. O. Karlsson, F. R. McFeely and J. A. Yarmoff, Phys. Rev. B34, 7295 (1986).

    Article  Google Scholar 

  10. 10.

    M. A. Olmstead, R. I. G. Uhrberg, R. D. Bringans, and R. Z. Bachrach, Phys. Rev. B35, 7526 (1987).

    Article  Google Scholar 

  11. 11.

    R. Wolkow and Ph. Avouris, to be published.

  12. 12.

    F. Bozso and Ph. Avouris, Appl. Phys. Lett. 53, 1095 (1988); Phys. Rev. B38, 3943 (1988); Phys. Rev. Lett. 57, 1185 (1986).

    CAS  Article  Google Scholar 

  13. 13.

    M. A. McCord and R. F. W. Pease, J. Vac. Sci. Technol. B4, 86 (1986); E. E. Ehrichs, S. Yoon, and A. L. deLozanne, Appl. Phys. Lett. (1988); in press.

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Correspondence to Phaedon Avouris.

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Avouris, P., Wolkow, R. Studies of Si Surface Chemistry and Epitaxy Using Scanning Tunneling Microscopy and Spectroscopy. MRS Online Proceedings Library 131, 157 (1988).

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