Synthesis of Transition Metal Epitaxial Silicides on Silicon (100), (111)

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  1. 1.

    R.T. Tung, A.F.J. Levi, and J.M. Gibson, J. Vac. Sci. Technol. B 4(6), 1435 (1986).

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Tokarev, V.V., Borisenko, V.E. & Pyatkova, T.M. Synthesis of Transition Metal Epitaxial Silicides on Silicon (100), (111). MRS Online Proceedings Library 128, 659–664 (1988). https://doi.org/10.1557/PROC-128-659

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