The method of Ion Beam Enhanced Deposition, (IBED), was used to produce hard films of i-BN, i-SixNy and i-TixNy. The friction, hardness, adhesion, and wear behavior of these nitride coatings were examined using a ba11-on-disc friction/wear tester. The friction and wear results were sensitive to stoichiometry and the presence of impurities (e.g., hydrogen) in the film as well as the choice of ball material (400C stainless steel or silicon nitride).
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H. Holleck, J. Vac. Scl. Technol. A4(6), pp. 2661–2669 Nov./Dec. 1986
N.E.W. Hartley, Trlbology International, p. 65 April 1975.
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Tetreault, T.G., Hirvonen, J.K., Parker, G. et al. The Friction and Wear Behavior of Ion Beam Assisted Nitride Coatings. MRS Online Proceedings Library 128, 439–444 (1988). https://doi.org/10.1557/PROC-128-439