The Friction and Wear Behavior of Ion Beam Assisted Nitride Coatings

Abstract

The method of Ion Beam Enhanced Deposition, (IBED), was used to produce hard films of i-BN, i-SixNy and i-TixNy. The friction, hardness, adhesion, and wear behavior of these nitride coatings were examined using a ba11-on-disc friction/wear tester. The friction and wear results were sensitive to stoichiometry and the presence of impurities (e.g., hydrogen) in the film as well as the choice of ball material (400C stainless steel or silicon nitride).

This is a preview of subscription content, access via your institution.

References

  1. 1.

    H. Holleck, J. Vac. Scl. Technol. A4(6), pp. 2661–2669 Nov./Dec. 1986

    Article  Google Scholar 

  2. 2.

    N.E.W. Hartley, Trlbology International, p. 65 April 1975.

  3. 3.

    J.F. Archard, Journal of Applied Physics, Vol. 24, p. 981 (1953).

    Article  Google Scholar 

Download references

Author information

Affiliations

Authors

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Tetreault, T.G., Hirvonen, J.K., Parker, G. et al. The Friction and Wear Behavior of Ion Beam Assisted Nitride Coatings. MRS Online Proceedings Library 128, 439–444 (1988). https://doi.org/10.1557/PROC-128-439

Download citation