0.5 MeV Submicron Ion Probe System for RBS/PIXE

MRS Online Proceedings Library volume 128, pages381–386(1988)Cite this article

Abstract

A nuclear microprobe-forming system for the microscopic RBS/PIXE measurement of micro devices has been developed and installed at the Research Center for Extreme Materials, Osaka University. The use of precision quadrupole magnets and an objective collimator ensures a final spot size of less than 1µm.

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Affiliations

  1. Faculty of Engineering Science and Research Center for Extreme Materials, Osaka University, Toyonaka, Osaka, 560, Japan

    K. Inoue, M. Takai, K. IshibashI, Y. Kawata, N. Suzuki & S. Namba

  2. Electronics Technology Center, Kobe Steel Ltd, Nishi-ku, Kobe, 673-02, Japan

    K. Inoue, K. IshibashI, Y. Kawata & N. Suzuki

Authors
  1. K. Inoue
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  2. M. Takai
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  3. K. IshibashI
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  4. Y. Kawata
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  5. N. Suzuki
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  6. S. Namba
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Inoue, K., Takai, M., IshibashI, K. et al. 0.5 MeV Submicron Ion Probe System for RBS/PIXE. MRS Online Proceedings Library 128, 381–386 (1988). https://doi.org/10.1557/PROC-128-381

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