0.5 MeV Submicron Ion Probe System for RBS/PIXE

Abstract

A nuclear microprobe-forming system for the microscopic RBS/PIXE measurement of micro devices has been developed and installed at the Research Center for Extreme Materials, Osaka University. The use of precision quadrupole magnets and an objective collimator ensures a final spot size of less than 1µm.

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Inoue, K., Takai, M., IshibashI, K. et al. 0.5 MeV Submicron Ion Probe System for RBS/PIXE. MRS Online Proceedings Library 128, 381–386 (1988). https://doi.org/10.1557/PROC-128-381

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