A Comparison Between High- and Low-Energy Ion Mixing

MRS Online Proceedings Library volume 128, pages189–194(1988)Cite this article

Abstract

Diffusion in a thermal spike is shown to be the dominant mechanism for both high-and low-energy ion mixing. The similarity between high- and low-energy ion mixing is the result of the fractal nature of collision cascades.

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References

  1. 1.

    B. M. Paine and R. S. Averback, Nucl. Instrum. Methods B7/8, 666 (1985).

    Article  Google Scholar 

  2. 2.

    J. Lindhard, M. Scharff, and H. E. Schiott, Mat. Fys. Medd. Dan. Vid. Selsk. 33, 14 (1963).

  3. 3.

    K. B. Winterbon, P. Sigmund, and J. B. Sanders, Mat. Fys. Medd. Dan. Vid. Selsk. 37, 1 (1970).

  4. 4.

    H. H. Anderson, Appl. Phys. 18, 131 (1979).

  5. 5.

    U. Littmark and W. O. Hofer, Nucl. Instrum. Methods 168, 329 (1980).

  6. 6.

    P. Sigmund and A. Gras-Marti, Nucl. Instrum. Methods 182/183, 25 (1981).

  7. 7.

    S. Matteson, Appl. Phys. Lett.. 30, 288 (1981).

    Article  Google Scholar 

  8. 8.

    Z. L. Wang, J. F. M. Westendrop, and F. W. Saris, Nucl. Instrum. Methods 209/210, 115 (1983).

  9. 9.

    B. V. King, S. G. Puranik, and R. J. Macdonald, Nucl. Instrum. Methods B33, 657 (1988).

  10. 10.

    Y.-T. Cheng, T. W. Workman, M-A. Nicolet, and W. L. Johnson, Mat. Res. Soc. Symp. Proc. Vol.. 74, 419 (1987).

    CAS  Article  Google Scholar 

  11. 11.

    W. L. Johnson, Y.-T. Cheng, M. Van Rossum, and M-A. Nicolet, Nucl. Instrum. Methods B 7/8, 657 (1985).

  12. 12.

    M. Van Rossum and Y.-T. Cheng, Diffusion and Defect Data 57-58, 1 (1988).

  13. 13.

    Y.-T. Cheng, M. Van Rossum, M-A. Nicolet, and W. L. Johnson, Appl. Phys. Lett.. 45, 185 (1984).

    CAS  Article  Google Scholar 

  14. 14.

    T. W. Workman, Y.-T. Cheng, W. L. Johnson, and M-A. Nicolet, Appl. Phys. Lett.. 50, 1485 (1987).

    CAS  Article  Google Scholar 

  15. 15.

    A. R. Miedema, Philips Tech. Rev.. 46, 217 (1976).

    Google Scholar 

  16. 16.

    G. H. Vineyard, Rad. Effects. 10, 245 (1976).

    Article  Google Scholar 

  17. 17.

    L. S. Darken, Trans. AIME. 175, 184 (1948).

    Google Scholar 

  18. 18.

    J. F. M. Westendorp, F. W. Saris, B. Koek, M. P. A. Viegers, and I. Fenn-Tye, Nucl. Instrum. Methods B26, 539 (1987).

  19. 19.

    F. d’Heurle, J. E. E. Baglin, and G. J. Clark, J. Appl. Phys. 57, 1427 (1985).

  20. 20.

    R. S. Bhattacharya and A. K. Rai, J. Appl. Phys. 58, 248 (1985).

  21. 21.

    A. K. Rai, R. S. Bhattacharya, M. H. Rashid, and A. W. Mc Cormick, Mat. Res. Soc. Symp. Proc.. 54, 231 (1986).

    CAS  Article  Google Scholar 

  22. 22.

    E. Rimini, M. Nastasi, J. Liu, J. C. Barbour, J-P. Hirvonen, and J. W. Mayer, Appl. Phys. Lett.. 48, 303 (1986).

    CAS  Article  Google Scholar 

  23. 23.

    V. Srinivasan and R. S. Bhattacharya, Surf. Interface Anal.. 10, 131 (1987).

    CAS  Article  Google Scholar 

  24. 24.

    G. C. Farlow, B. R. Appleton, L. A. Boatner, C. J. McHargue, C. W. White, G. J. Clark, and J. E. E. Baglin, Mat. Res. Soc. Symp. Proc.. 45, 137 (1985).

    CAS  Article  Google Scholar 

  25. 25.

    J. P. Hirvonen, M. Nastasi, and J. W. Mayer, Nucl. Instrum. Methods. B13, 479 (1986).

    CAS  Article  Google Scholar 

  26. 26.

    M. Nastasi, J-P. Hirvonen, M. Caro, E. Rimini, and J. W. Mayer, Appl. Phys. Lett.. 50, 177 (1987).

    CAS  Article  Google Scholar 

  27. 27.

    R. S. Bhattacharya, A. K. Rai, and P. P. Pronko, J. Appl. Phys.. 61, 5263 (1987).

    CAS  Article  Google Scholar 

  28. 28.

    S-J. Kim, M-A. Nicolet, R. S. Averback, and D. Peak, Phys. Rev. B 37 38 (1988).

  29. 29.

    Y.-T. Cheng, A. A. Dow, and B. M. Clemens, Appl. Phys. Lett.. 53, 1346 (1988).

    CAS  Article  Google Scholar 

  30. 30.

    Y.-T. Cheng, A. A. Dow, B. M. Clemens, and E.-H. Cirlin, J. Vac. Sci. Tech., in press.

  31. 31.

    E.-H. Cirlin, Y.-T. Cheng, B. M. Clemens, and P. Ireland, J. Vac. Sci. Tech., to be published.

  32. 32.

    Y.-T. Cheng, M-A. Nicolet, and W. L. Johnson, Phys. Rev. Lett. 58, 2083 (1988).

  33. 33.

    Y.-T. Cheng, in “NATO Advanced Study Institute Programme, Materials Modification by High-Fluence Ion Beams,” edited by R. Kelly and M. da Silva (Cluwer, Dordrecht, 1988), p. 191.

  34. 34.

    K. B. Winterbon, H. M. Urbassek, P. Sigmund, and A. Gras-Marti, Phys. Scripta. 36, 689 (1987).

    CAS  Article  Google Scholar 

  35. 35.

    Y.-T. Cheng, unpublished results.

  36. 36.

    R. S. Averback, private communications.

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Author notes

  1. A. A. Dow

    Present address: Digital Equipment Co, Northboro, MA, 01532, United States

Affiliations

  1. General Motors Research Laboratories, Warren, MI, 48090-9055, United States

    Y. -T. Cheng, B. M. Clemens & A. A. Dow

  2. Hughes Research Laboratories, Malibu, CA, 90265, United States

    E. -H. Cirlin

Authors
  1. Y. -T. Cheng
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  2. E. -H. Cirlin
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  3. B. M. Clemens
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  4. A. A. Dow
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Corresponding author

Correspondence to A. A. Dow.

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Cheng, Y.T., Cirlin, E.H., Clemens, B.M. et al. A Comparison Between High- and Low-Energy Ion Mixing. MRS Online Proceedings Library 128, 189–194 (1988). https://doi.org/10.1557/PROC-128-189

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