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A Comparison Between High- and Low-Energy Ion Mixing

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Diffusion in a thermal spike is shown to be the dominant mechanism for both high-and low-energy ion mixing. The similarity between high- and low-energy ion mixing is the result of the fractal nature of collision cascades.

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References

  1. B. M. Paine and R. S. Averback, Nucl. Instrum. Methods B7/8, 666 (1985).

    Article  Google Scholar 

  2. J. Lindhard, M. Scharff, and H. E. Schiott, Mat. Fys. Medd. Dan. Vid. Selsk. 33, 14 (1963).

  3. K. B. Winterbon, P. Sigmund, and J. B. Sanders, Mat. Fys. Medd. Dan. Vid. Selsk. 37, 1 (1970).

  4. H. H. Anderson, Appl. Phys. 18, 131 (1979).

  5. U. Littmark and W. O. Hofer, Nucl. Instrum. Methods 168, 329 (1980).

  6. P. Sigmund and A. Gras-Marti, Nucl. Instrum. Methods 182/183, 25 (1981).

  7. S. Matteson, Appl. Phys. Lett.. 30, 288 (1981).

    Article  Google Scholar 

  8. Z. L. Wang, J. F. M. Westendrop, and F. W. Saris, Nucl. Instrum. Methods 209/210, 115 (1983).

  9. B. V. King, S. G. Puranik, and R. J. Macdonald, Nucl. Instrum. Methods B33, 657 (1988).

  10. Y.-T. Cheng, T. W. Workman, M-A. Nicolet, and W. L. Johnson, Mat. Res. Soc. Symp. Proc. Vol.. 74, 419 (1987).

    Article  CAS  Google Scholar 

  11. W. L. Johnson, Y.-T. Cheng, M. Van Rossum, and M-A. Nicolet, Nucl. Instrum. Methods B 7/8, 657 (1985).

  12. M. Van Rossum and Y.-T. Cheng, Diffusion and Defect Data 57-58, 1 (1988).

  13. Y.-T. Cheng, M. Van Rossum, M-A. Nicolet, and W. L. Johnson, Appl. Phys. Lett.. 45, 185 (1984).

    Article  CAS  Google Scholar 

  14. T. W. Workman, Y.-T. Cheng, W. L. Johnson, and M-A. Nicolet, Appl. Phys. Lett.. 50, 1485 (1987).

    Article  CAS  Google Scholar 

  15. A. R. Miedema, Philips Tech. Rev.. 46, 217 (1976).

    Google Scholar 

  16. G. H. Vineyard, Rad. Effects. 10, 245 (1976).

    Article  Google Scholar 

  17. L. S. Darken, Trans. AIME. 175, 184 (1948).

    Google Scholar 

  18. J. F. M. Westendorp, F. W. Saris, B. Koek, M. P. A. Viegers, and I. Fenn-Tye, Nucl. Instrum. Methods B26, 539 (1987).

  19. F. d’Heurle, J. E. E. Baglin, and G. J. Clark, J. Appl. Phys. 57, 1427 (1985).

  20. R. S. Bhattacharya and A. K. Rai, J. Appl. Phys. 58, 248 (1985).

  21. A. K. Rai, R. S. Bhattacharya, M. H. Rashid, and A. W. Mc Cormick, Mat. Res. Soc. Symp. Proc.. 54, 231 (1986).

    Article  CAS  Google Scholar 

  22. E. Rimini, M. Nastasi, J. Liu, J. C. Barbour, J-P. Hirvonen, and J. W. Mayer, Appl. Phys. Lett.. 48, 303 (1986).

    Article  CAS  Google Scholar 

  23. V. Srinivasan and R. S. Bhattacharya, Surf. Interface Anal.. 10, 131 (1987).

    Article  CAS  Google Scholar 

  24. G. C. Farlow, B. R. Appleton, L. A. Boatner, C. J. McHargue, C. W. White, G. J. Clark, and J. E. E. Baglin, Mat. Res. Soc. Symp. Proc.. 45, 137 (1985).

    Article  CAS  Google Scholar 

  25. J. P. Hirvonen, M. Nastasi, and J. W. Mayer, Nucl. Instrum. Methods. B13, 479 (1986).

    Article  CAS  Google Scholar 

  26. M. Nastasi, J-P. Hirvonen, M. Caro, E. Rimini, and J. W. Mayer, Appl. Phys. Lett.. 50, 177 (1987).

    Article  CAS  Google Scholar 

  27. R. S. Bhattacharya, A. K. Rai, and P. P. Pronko, J. Appl. Phys.. 61, 5263 (1987).

    Article  CAS  Google Scholar 

  28. S-J. Kim, M-A. Nicolet, R. S. Averback, and D. Peak, Phys. Rev. B 37 38 (1988).

  29. Y.-T. Cheng, A. A. Dow, and B. M. Clemens, Appl. Phys. Lett.. 53, 1346 (1988).

    Article  CAS  Google Scholar 

  30. Y.-T. Cheng, A. A. Dow, B. M. Clemens, and E.-H. Cirlin, J. Vac. Sci. Tech., in press.

  31. E.-H. Cirlin, Y.-T. Cheng, B. M. Clemens, and P. Ireland, J. Vac. Sci. Tech., to be published.

  32. Y.-T. Cheng, M-A. Nicolet, and W. L. Johnson, Phys. Rev. Lett. 58, 2083 (1988).

  33. Y.-T. Cheng, in “NATO Advanced Study Institute Programme, Materials Modification by High-Fluence Ion Beams,” edited by R. Kelly and M. da Silva (Cluwer, Dordrecht, 1988), p. 191.

  34. K. B. Winterbon, H. M. Urbassek, P. Sigmund, and A. Gras-Marti, Phys. Scripta. 36, 689 (1987).

    Article  CAS  Google Scholar 

  35. Y.-T. Cheng, unpublished results.

  36. R. S. Averback, private communications.

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Cheng, Y.T., Cirlin, E.H., Clemens, B.M. et al. A Comparison Between High- and Low-Energy Ion Mixing. MRS Online Proceedings Library 128, 189–194 (1988). https://doi.org/10.1557/PROC-128-189

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  • DOI: https://doi.org/10.1557/PROC-128-189

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