Nanoscale Ruthenium Coatings of MEMS Switches Contacts

Abstract

The paper reports the tests results of ruthenium contacts coatings of magnetically controlled MEMS switches. During the tests the contact resistance was measured and the lifetime of MEMS switches was evaluated. After testing the analysis of the form and contact surface structure using SEM-method was carried out. The experiment results showed that the application of ruthenium nanolayers as the contact coating at slight increase of the contact resistance improves the lifetime of MEMS switches considerably.

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Correspondence to Sergey M. Karabanov.

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Karabanov, S.M., Karabanov, A.S., Suvorov, D.V. et al. Nanoscale Ruthenium Coatings of MEMS Switches Contacts. MRS Online Proceedings Library 1249, 809 (2010). https://doi.org/10.1557/PROC-1249-F08-09

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