An Alternative Non-contact Planarization Technique by Utilizing the Electrokinetic Phenomenon

Abstract

In this paper, the authors introduce and present some findings on an alternative non-contact material removal technique. Material removal is made possible by utilizing the electrokinetic and hydrodynamic effects of suspended particles to manipulate their trajectories to impact onto the surface of the workpiece. The research was previously demonstrated and reported where the removal rate can be precisely controlled by varying the electrical field and the flow rate of the slurry across the surface of the workpiece. New findings are reported on the application of the technique to different materials that will highlight the attractiveness of this alternative approach to producing surfaces with roughness in the order of nanometres.

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References

  1. 1.

    V.K. Jain, Machining Science and Technology 12 (3), 257–294 (2008).

    CAS  Article  Google Scholar 

  2. 2.

    R. Murata, K. Okano, and C. Tsutsumi, in Proceedings of the Milton C. Shaw Grinding Symposium, (PED 16, 1985) pp. 261–272.

  3. 3.

    H. Ohmori, T. Nakagawa, Annals of the CIRP 39 (1), 329–332 (1990).

    Article  Google Scholar 

  4. 4.

    A. Geddam, and C.F. Noble, International Journal of Machine Tool Design and Research 11 (1), 1–12 (1971).

    Article  Google Scholar 

  5. 5.

    C.S. Leo, T.L. Blackburn, S.H. Ng, C. Yang, D.L. Butler, and S. Danyluk, in Device and Process Technologies for Microelectronics, MEMS, Photonics and Nanotechnology IV, edited by H. H. Tan, J. C. Chiao, L. Faraone, C. Jagadish, J. Williams and A. R. Wilson, (Proc. of SPIE Vol. 6800, 680028, 2008) pp. 1–10.

  6. 6.

    G.M. Whitesides, Nature 442 (7101), 368–373 (2006).

  7. 7.

    R.J. Hunter, in Zeta Potential in Colloid Science: Principle and Applications, (Academic Press, London, 1980).

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Correspondence to C. S. Leo.

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Leo, C.S., Ng, S.H., Butler, D.L. et al. An Alternative Non-contact Planarization Technique by Utilizing the Electrokinetic Phenomenon. MRS Online Proceedings Library 1249, 503 (2010). https://doi.org/10.1557/PROC-1249-E05-03

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