Characterization of Large Particles in Fumed Silica Based CMP Slurry

Abstract

Large particles in fumed silica dispersions were characterized by sedimentation, light scattering techniques, Transmission Electron Microscopy (TEM), and lacunarity. Applying centrifugation to fumed silica dispersions generated differences in sedimentation rates of large particles. The sedimentation rates of the large particles were affected by morphological differences and the particles remaining in the supernatant displayed buoyant behavior. The large particle morphology varied from branch like aggregates containing large primary particles to particles comprised of highly coalesced, tightly packed small primary particles. The results indicate the presence of different types of large particles in fumed silica dispersions to which conventional large particle characterization is unable to distinguish.

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References

  1. 1.

    E. Remsen, S. Anjur, D. Boldridge, M. Camiti, Shoutian Li, T. Johns, C. Dowell, J. Kasthurirangan, P. Feeney, J. Electrochem. Soc, 153, G453–461, (2006)

    CAS  Article  Google Scholar 

  2. 2.

    K. Tamai, T. Akatsuka, H. Morinaga, T. Doi, S. Kurakawa, ICPT Proceedings, 296–300 (2009)

  3. 3.

    W. Rader, K. Tamai, J. Tupper, K. Suzuki, CMP Users Group, Northern California Section of the American Vacuum Society, Proceedings, December (2001)

  4. 4.

    W. Rader, K. Tamai, K. Suzuki, International Symposium on Chemical-Mechanical Planarization, CAMP Proceedings, 4, (1999)

  5. 5.

    W. Rader, J. Lin, T. Holt, International Symposium on Chemical-Mechanical Planarization, CAMP Proceedings, 12, (2007)

  6. 6.

    J. Hyeon-Lee, G. Beaucage, S. Pratsinis, S. Vermury, Langmuir, 14, 5751–5756 (1998)

    CAS  Article  Google Scholar 

  7. 7.

    D. Bolridge, Aerosol Sci. and Tech, 44-3, 182–186 (2010)

    Article  Google Scholar 

  8. 8.

    J. Gregory, Wat. Sci. Tech, 36- 4, 1–13, (1997)

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Correspondence to W. Scott Rader.

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Rader, W.S., Holt, T. & Tamai, K. Characterization of Large Particles in Fumed Silica Based CMP Slurry. MRS Online Proceedings Library 1249, 408 (2010). https://doi.org/10.1557/PROC-1249-E04-08

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