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Hydrogen Incorporation in MPCVD Nanocrystalline Diamond Films During the Deposition Process

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Abstract

Hydrogen incorporation is studied in two Microwave Plasma CVD nanocrystalline diamond films deposited with prolongated BIAS or not during the growth step. The hydrogen content and bonding forms are analysed by Secondary Ion Mass Spectrometry, Raman and Fourier Transformer Infrared Spectroscopy. Our results show a high hydrogen concentration up to 3.1021 cm-1, as expected in nanocrystalline diamond, and in good agreement with the sp2 phase rate measured by Raman spectroscopy . The FTIR spectra exhibit two sharp peaks at 2850 and 2920 cm-1 and show that a fraction of hydrogen is bonded to sp3 CH2 groups. Hydrogen desorption experiments are performed to analyse the local structure modification of the diamond films.

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Authors and Affiliations

  1. CNRS-GEMaC, 1 place Aristide Briand, Meudon cedex, 92195, France

    Dominique Ballutaud, Marie-Amandine Pinault, François Jomard & Alain Lusson

  2. CEA, LIST, Diamond Sensor Laboratory, Gif-sur-Yvette, 91191, France

    Samuel Saada

Authors
  1. Dominique Ballutaud
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  2. Marie-Amandine Pinault
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  3. François Jomard
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  4. Alain Lusson
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  5. Samuel Saada
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Ballutaud, D., Pinault, MA., Jomard, F. et al. Hydrogen Incorporation in MPCVD Nanocrystalline Diamond Films During the Deposition Process. MRS Online Proceedings Library 1203, 1733 (2009). https://doi.org/10.1557/PROC-1203-J17-33

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  • DOI: https://doi.org/10.1557/PROC-1203-J17-33

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