Photothermal deflection spectroscopy, infrared, and Raman measurements are presented for a series of a-SiC:H samples containing different amounts of microstructure. The Urbach edge is seen to widen systematically as the film microstructure increases, but the width of the Raman transverse optical mode remains unchanged. We argue that the increase in Urbach edge width with increasing C content is due entirely to the increase in microstructure. In addition, from the invariance of the Raman measurements with increasing microstructure and the assumed sensitivity of the Raman technique to surface states on the interior surfaces of these microstructural features, we are able to place lower limits on the size of these features. Such sizes are corroborated by preliminary small angle xray scattering measurements on identically prepared samples.
This is a preview of subscription content, access via your institution.
Buy single article
Instant access to the full article PDF.
Tax calculation will be finalised during checkout.
D. A. Anderson and W. E. Spear, Phil Mag. 35, 1 (1977).
Y. Tawada, K. Tsuge, M. Kondo, H. Okamoto, and Y. Hamakawa, J. Appl. Phys. 53, 5273 (1982).
Y. Kuwano, M. Ohnishi, H. Nishiwaki, S. Tsuda, T. Fukatsu, K. Enomoto, Y. Nakashima, and H. Tarui, 16th IEEE PV Spec. Conf., San Diego, CA (IEEE, New York, 1982), p. 1331.
R. E. Hollingsworth, P. K. Bhat, and A. Madan, 19th IEEEE PV Spec. Conf., New Orleans (IEEE, New York, 1987), p. 684.
B. Fieselmann, M. Milligan, A. Wilczynski, J. Pickens, and C. R. Dickson, 19th IEEE PV Spec. Conf., New Orleans (IEEE, New York, 1987), p. 1510.
W. Beyer, H. Wagner, and F. Finger, J. Non-Cryst. Solids 77–78, 857 91985).
A. H. Mahan, P. Raboisson, D. L. Williamson, and R. Tsu, Solar Cells 21, 117 (1987).
A. H. Mahan, P. Raboisson, and R. Tsu, Appl. Phys. Lett. 50, 335 (1987).
A. H. Mahan, P. Menna, and R. Tsu, Appl. Phys. Lett. 51, 1167 (1987).
B. von Roedern, A. H. Mahan, D. L. Williamson, and A. Madan, J. Non-Cryst. Solids 106, 13 (1984).
A. H. Mahan, P. Raboisson, P. Menna, and R. Tsu, Mat. Res. Soc. Symp. 95, 361 (1987).
P. Menna, A. H. Mahan, and R. Tsu, 19th IEEE PV Spec. Conf., New Orleans (IEEE, New York, 1987), p.
G. D. Cody, T. Tiedje, B. Abeles, B. Brooks, and Y. Goldstein, Phys. Rev. Lett. 47, 1480 (1982).
A. Skumanich, A. Frova, and N. M. Amer, Solid State Commun. 54, 597 (1985).
T. Ichimura, T. Hama, T. Ihara, M. Ohsawa, H. Sakai, and Y. Uchida, 18th IEEE PV Spec. Conf., Las Vegas (IEEE, New York, 1985), p. 1495.
S. Yamasaki, Phil. Mag. B 56, 79 (1987).
D. Beeman, R. Tsu, and M. F. Thorpe, Phys. Rev. B32, 874 (1985).
Y. Hishikawa, K. Wantanabe, S. Tsuda, M. Ohnishi, and Y. Kuwano, Jpn. Appl. Phys. 24, 385 (1985).
A. Morimoto, S. Oozora, M. Kumeda, and T. Shimizu, Solid State Commun. 47, 773 (1983). We confine our comparison to films with C contents <22 at.%, which encompasses the range of C contents of the present samples.
D.E. Aspnes, SPIE 276, 188 (1981).
T. Sakurai and H.D. Hagstrum, Phys. Rev. B 14, 1593 (1976).
About this article
Cite this article
Mahan, A.H., Mascarenhas, A., Williamson, D.L. et al. Microstructure and the Urbach Edge in Glow Discharge Deposited a-SiC:H. MRS Online Proceedings Library 118, 641 (1988). https://doi.org/10.1557/PROC-118-641