Structure of Hydrogen in Microcrystalline and Amorphous Silicon: an NMR Comparison

Abstract

Hydrogen NMR data on three microcrystalline silicon samples grown by plasma decomposition using different H2/SiH4 gas ratios are examined. A decrease of the total atomic percent hydrogen content from 12 at.% to 6 at.% is seen as the gas ratio is reduced from 98/1 to 20/1. 20 to 40% of this total hydrogen content is determined to be non-bonded molecular hydrogen. In addition, evidence for SiH2 units is seen in the spectrum.

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References

  1. 1

    M. Kumeda, Y. Yonezawa, A. Morimoto, S. Ueda and T. Shimizu, J. Non. Cryst. Solids 59, 775 (1983).

    Article  Google Scholar 

  2. 2

    S. Hayashi, S. Yamasaki, A. Matsuda and K. Tanaka, J. Non. Cryst. Solids 59, 779 (1983).

    Article  Google Scholar 

  3. 3

    J. A. Reimer, R. W. Vaughn, and J. C. Knights, Phys. Rev. B, 24, 3360 (1981)

    CAS  Article  Google Scholar 

  4. 4

    J. B. Boyce and M. Stutzmann, Phys. Rev. Lett. 54, 562 (1985).

    CAS  Article  Google Scholar 

  5. 5

    M. S. Conradi and R. E. Norberg, Phys. Rev. B, 24, 2285 (1981)

    CAS  Article  Google Scholar 

  6. 6

    W. E. Carlos and P.C Taylor, Phys. Rev. B, 25, 1435 (1982)

    CAS  Article  Google Scholar 

  7. 7

    D. J. Leoplod, J. B. Boyce, P. A. Fedders, and R. E. Norberg, Phys. Rev. B, 26, 6053 (1982)

    Article  Google Scholar 

  8. 8

    J. B. Boyce, M. Stutzmann, and S. E. Ready, J. Non. Cryst. Solids, 77, 265 (1985)

    Article  Google Scholar 

  9. 9

    J. B. Boyce in Hydrogen in Disordered and Amorphous Silicon, edited by G. Bambakidis and R. C. Bowman (NATO Advanced Study Inst. Proc. Rhodes, Greece 1985) pp. 101–109.

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Correspondence to S. E. Ready.

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Ready, S.E., Boyce, J.B. & Tsai, C.C. Structure of Hydrogen in Microcrystalline and Amorphous Silicon: an NMR Comparison. MRS Online Proceedings Library 118, 103 (1988). https://doi.org/10.1557/PROC-118-103

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