Structure of Hydrogen in Microcrystalline and Amorphous Silicon: an NMR Comparison


Hydrogen NMR data on three microcrystalline silicon samples grown by plasma decomposition using different H2/SiH4 gas ratios are examined. A decrease of the total atomic percent hydrogen content from 12 at.% to 6 at.% is seen as the gas ratio is reduced from 98/1 to 20/1. 20 to 40% of this total hydrogen content is determined to be non-bonded molecular hydrogen. In addition, evidence for SiH2 units is seen in the spectrum.

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Correspondence to S. E. Ready.

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Ready, S.E., Boyce, J.B. & Tsai, C.C. Structure of Hydrogen in Microcrystalline and Amorphous Silicon: an NMR Comparison. MRS Online Proceedings Library 118, 103 (1988).

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