Hydrogen NMR data on three microcrystalline silicon samples grown by plasma decomposition using different H2/SiH4 gas ratios are examined. A decrease of the total atomic percent hydrogen content from 12 at.% to 6 at.% is seen as the gas ratio is reduced from 98/1 to 20/1. 20 to 40% of this total hydrogen content is determined to be non-bonded molecular hydrogen. In addition, evidence for SiH2 units is seen in the spectrum.
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M. Kumeda, Y. Yonezawa, A. Morimoto, S. Ueda and T. Shimizu, J. Non. Cryst. Solids 59, 775 (1983).
S. Hayashi, S. Yamasaki, A. Matsuda and K. Tanaka, J. Non. Cryst. Solids 59, 779 (1983).
J. A. Reimer, R. W. Vaughn, and J. C. Knights, Phys. Rev. B, 24, 3360 (1981)
J. B. Boyce and M. Stutzmann, Phys. Rev. Lett. 54, 562 (1985).
M. S. Conradi and R. E. Norberg, Phys. Rev. B, 24, 2285 (1981)
W. E. Carlos and P.C Taylor, Phys. Rev. B, 25, 1435 (1982)
D. J. Leoplod, J. B. Boyce, P. A. Fedders, and R. E. Norberg, Phys. Rev. B, 26, 6053 (1982)
J. B. Boyce, M. Stutzmann, and S. E. Ready, J. Non. Cryst. Solids, 77, 265 (1985)
J. B. Boyce in Hydrogen in Disordered and Amorphous Silicon, edited by G. Bambakidis and R. C. Bowman (NATO Advanced Study Inst. Proc. Rhodes, Greece 1985) pp. 101–109.
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Ready, S.E., Boyce, J.B. & Tsai, C.C. Structure of Hydrogen in Microcrystalline and Amorphous Silicon: an NMR Comparison. MRS Online Proceedings Library 118, 103 (1988). https://doi.org/10.1557/PROC-118-103