Conformal MOCVD Deposition of GeSbTe in High Aspect Ratio Via Structure for Phase Change Memory Applications

Abstract

We have demonstrated conformal deposition of amorphous GeSbTe films in high aspect ratio structures by MOCVD. SEM analysis showed the as-deposited GeSbTe films had smooth morphologies and were well controlled for void free amorphous conformal deposition. GeSbTe films adhere well to SiO2, TiN, and TiAlN. The morphology and adhesion are stable in 420°C post process. By annealing at 365°C, amorphous GeSbTe films converted into crystalline GeSbTe with polycrystalline grain sizes of 5nm. Film resistivity in the crystalline phase ranged from 0.001 to 0.1 Ω-cm, suitable for device applications. Phase change devices fabricated with confined via structures filled with MOCVD GeSbTe showed cycle endurances up to 1×1010 with a dynamic set/rest resistance of two orders of magnitude.

This is a preview of subscription content, access via your institution.

References

  1. 1

    S. R. Ovshinsky, Phys. Rev. Lett. 21, 1450 (1968).

    Article  Google Scholar 

  2. 2

    S. Lai, Tech. Dig. Int. Electronic Devices Meet. 2003, 255.

  3. 3

    J. I. Lee, S. L. Cho, Y. L. Park, B. J. Bae, J. H. Park, J. S. Park, H. G. An, J. S. Bae, D. H. Ahn, Y. T. Kim, H. Horrii, S. A. Song, J. C. Shin, S. O. Park, H. S. Kim, U.-I. Chung, J. T. Moon, and B, I. Ryu, Symp. of VLSI Tech. Dig., 2007, 102

  4. 4

    D. H. Im, J. I. Lee, S. L. Cho, H. G. An, D. H. Kim, I. S. Kim, H. Park, D. H. Ahn, H. Horii, S. O. Park, U-In Chung, and J. T. Moon, Dig. Int. Electronic Devices Meet. 2008, 211

  5. 5

    A. Pirovano F. Pellizer, I. Tortorelli, R. Harrigan, M. Magistretti, P.Petruzza, E. Varesi, D. Erbetta, T. Marangon, F. Bedeschi, R. Fackenthal, G. Atwood, and R. Bez, Solid-State Electronics, 52, 1467 (2008).

    CAS  Article  Google Scholar 

  6. 6

    B.J. Choi, S. Choi, Y. C. Shin, C. S. Hwang, J. W. Lee, J. Jeong, Y. J. Kim, S.-Y. Hwang, And S. K. Hong, J. Electrochem. Soc. 154, H318 (2007).

    CAS  Article  Google Scholar 

  7. 7

    V. Pore, T. Hatanpaa, M. Ritala, M. Leskela, J. of American Chemical Society, 131, 3478 (2009)

    CAS  Article  Google Scholar 

  8. 8

    T. Kato and K. Tanaka, Japanese, J. Appl. Phys. 44, 7340 (2005).

    CAS  Article  Google Scholar 

  9. 9

    http://www.semiconductor.net/article/CA6621100.html.

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to J. F. Zheng.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Zheng, J.F., Chen, P., Hunks, W. et al. Conformal MOCVD Deposition of GeSbTe in High Aspect Ratio Via Structure for Phase Change Memory Applications. MRS Online Proceedings Library 1160, 1411 (2009). https://doi.org/10.1557/PROC-1160-H14-11

Download citation