Abstract
We report on the fabrication of nano-crystalline silicon-carbide (nc-SiC) using pulse modulated RF-PECVD technique, from silane (SiH4) and methane (CH4) gas mixtures which is highly diluted in hydrogen (H2). The microstructure of nc-SiC material is nanometer-size silicon crystallites embedded in amorphous silicon-carbide (a-SiC) matrix. As carbon incorporation in nc-Si film increases, the bandgap is enlarged from 1.1eV to 1.55eV as measured by Photothermal Deflection Spectroscopy (PDS) while the crystalline volume fraction decreases from 70% to about 20%. It is found that the crystalline volume fraction, grain size and dark conductivity of nc-SiC films can be enhanced with applying a negative DC bias to substrate during deposition.
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References
D. L. Staebler and C. R. Wronski, Appl. Phys. Lett. 31, (1977) 292
D.E.Carlson, Appl.Phys. A 41 (1986) 305–309
K.Yamamoto, A. Nakajima, M.Yoshimi, et.al, Solar Energy, 77, (2004)939
O. Cubero, T. Söderström, F.J. Haug, et.al., Proceedings of the 23th EU-PVSEC Conference, Valencia, Spain (2008)
A.Shah, J.Meier, E.Vallat-Sauvain, et.al., Thin Solid Films, Vol. 403–404 (2002) 179–187
Y. Baojie, G. Yue, and S. Guha, Mat. Res. Soc. Proc., April (2007) A15.1
J.Yang, A.Banerjee, and S.Guha, Appl. Phys.Lett. 70 (1997) 2975
Baojie Yan, Gouzhe Yue, Yanfa Yan, et.al., Mat. Res. Soc. Proc. Vol.1066 (2008) A03.03
F.Meillaud, E.vallat-Sauvain, A. Shah, et.al., Appl. Phys. Lett., 103 (2008) 054504
Yan Wang, Xiaoyan Han, Feng Zhu, et.al., J. Non-Crystal. 352 (2006) 1909–1912
Guozhen Yue, Baojie Yan, Gautam Ganguly, et.al., Appl. Phys. Lett., 88, (2006) 263507
M. Konagai, S. Miyajima, Y. Yashiki, T. Watahiki, K. L Narayanan and A. Yamada, Proc. 31 IEEE Photovoltaic Specialists Conference, (2005) 1424
Scott Morrison, Jianping Xi, Arun Madan, MRS proceedings, 507 (1998) 559
B.D.Cullity, In Elements of X-Ray Diffraction, Addison-Wesley Publishing Company, Inc., (1978) 283–300
A. H. M. Smets, and M. C. M. van de Sanden, Physical Review B 76 (2007) 073202
G. Ambrosone, U. Coscia, S. Lettieri, et.al., Thin Solid Films 511–512 (2006) 280–284
F.Demichelis, C.F.Pirri, and E.Tresso, J.Appl.Phys. 72 (4) (1992) 1327
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Zhu, F., Hu, J., Matulionis, I. et al. Properties of Nano-crystalline Silicon-Carbide Films Prepared Using Modulated RF-PECVD. MRS Online Proceedings Library 1153, 1703 (2008). https://doi.org/10.1557/PROC-1153-A17-03
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DOI: https://doi.org/10.1557/PROC-1153-A17-03