Abstract
We have developed high efficiency large area a-Si:H and a-SiGe:H multi-junction solar cells using a Modified Very High Frequency (MVHF) glow discharge process. We conducted a comparative study for different cell structures, and compared the initial and stable performance and light-induced degradation of solar cells made using MVHF and RF techniques. Besides high efficiency, the MVHF cells also demonstrate superior light stability, showing <10% degradation after 1000 hour of one-sun light soaking at 50 °C. We also studied light-induced defect level and hydrogen evolution characteristics of MVHF deposited a-SiGe:H films and compared them with the RF deposited films.
Similar content being viewed by others
References
S. Guha, J. Yang, S. Jones, Y. Chen, and D. Williamson, Appl. Phys. Lett. 61, 1444 (1992).
S. J. Jones, Y. Chen, D. L. Williamson, X. Xu, J. Yang, and S. Guha, Mat. Res. Soc. Symp. Proc. Vol. 297, p. 815 (1993).
G. Yue, B. Yan, J. Yang, and S. Guha, Mat. Res. Soc. Symp. Proc. Vol. 989, p.359 (2007).
A. Triska, D. Dennison and H. Fritzsche, Bull. Am. Phys. Soc. 20 (1975) 392.
P. Hugger, J. Lee, J. D. Cohen, X. Xu, B. Yan, J. Yang, and S. Guha, to be presented in 2009 MRS Spring Meeting, Symp. A.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Xu, X., Beglau, D., Ehlert, S. et al. High Efficiency Large Area a-Si:H and a-SiGe:H Multi-junction Solar Cells Using MVHF at High Deposition Rate. MRS Online Proceedings Library 1153, 701 (2008). https://doi.org/10.1557/PROC-1153-A07-01
Received:
Accepted:
Published:
DOI: https://doi.org/10.1557/PROC-1153-A07-01