Measurement and Analysis of Structural Damping in Silicon Carbide Microresonators

Abstract

The design of microresonators with high natural frequencies (1 MHz to 1 GHz) and low structural damping is essential for devices used for applications in communications. Here, we report experimental measurements of damping at low pressure and ambient temperature in electrostatically-actuated, metallized silicon carbide microresonators. Comparison of the measured values with the predictions of a model for thermoelastic damping indicates that the contribution of this mechanism to the measured damping ranges from 10% to 50% over a broad frequency range (3 MHz to 30 MHz).

This is a preview of subscription content, access via your institution.

References

  1. [1]

    F. Nabki, T.A. Dusatko, S. Vengallatore, and M.N. El-Gamal, Tech. Dig. Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, pp. 216–219, 2008.

    Google Scholar 

  2. [2]

    J. Crocker, G. Sosale, and S. Vengallatore, Proceedings of the 21st Canadian Congress of Applied Mechanics (CANCAM), June 3–7, 2007, Toronto, Canada.

    Google Scholar 

  3. [3]

    J.E. Bishop and V.K. Kinra, Int. J. Solids Structures, 34, 1075 (1997).

    Article  Google Scholar 

  4. [4]

    S. Vengallatore J. Micromech. Microeng., 15, 2398 (2005).

    Article  Google Scholar 

  5. [5]

    S. Prabhakar, and S. Vengallatore, J. Micromech. Microeng., 17, 532 (2007).

    CAS  Article  Google Scholar 

  6. [6]

    M.N. Ozisik, Heat Conduction, (John Wiley and Sons, New York, 1993)

    Google Scholar 

  7. [7]

    B.A. Boley and J.H. Weiner, Theory of Thermal Stresses, (Wiley, New York, 1960).

    Google Scholar 

  8. [8]

    W.H. Press, S.A. Teukolsky, W.T. Vetterling and B.P. Flannery, Numerical Recipes in C++: The Art of Scientific Computing, (Cambridge University Press, Cambridge, 2002).

    Google Scholar 

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to Sairam Prabhakar.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Prabhakar, S., Nabki, F., El-Gamal, M. et al. Measurement and Analysis of Structural Damping in Silicon Carbide Microresonators. MRS Online Proceedings Library 1139, 304 (2008). https://doi.org/10.1557/PROC-1139-GG03-04

Download citation