Measurement and Analysis of Structural Damping in Silicon Carbide Microresonators

MRS Online Proceedings Library volume 1139, Article number: 304 (2008) Cite this article

Abstract

The design of microresonators with high natural frequencies (1 MHz to 1 GHz) and low structural damping is essential for devices used for applications in communications. Here, we report experimental measurements of damping at low pressure and ambient temperature in electrostatically-actuated, metallized silicon carbide microresonators. Comparison of the measured values with the predictions of a model for thermoelastic damping indicates that the contribution of this mechanism to the measured damping ranges from 10% to 50% over a broad frequency range (3 MHz to 30 MHz).

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References

  1. [1]

    F. Nabki, T.A. Dusatko, S. Vengallatore, and M.N. El-Gamal, Tech. Dig. Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, pp. 216–219, 2008.

    Google Scholar 

  2. [2]

    J. Crocker, G. Sosale, and S. Vengallatore, Proceedings of the 21st Canadian Congress of Applied Mechanics (CANCAM), June 3–7, 2007, Toronto, Canada.

    Google Scholar 

  3. [3]

    J.E. Bishop and V.K. Kinra, Int. J. Solids Structures, 34, 1075 (1997).

    Article  Google Scholar 

  4. [4]

    S. Vengallatore J. Micromech. Microeng., 15, 2398 (2005).

    Article  Google Scholar 

  5. [5]

    S. Prabhakar, and S. Vengallatore, J. Micromech. Microeng., 17, 532 (2007).

    CAS  Article  Google Scholar 

  6. [6]

    M.N. Ozisik, Heat Conduction, (John Wiley and Sons, New York, 1993)

    Google Scholar 

  7. [7]

    B.A. Boley and J.H. Weiner, Theory of Thermal Stresses, (Wiley, New York, 1960).

    Google Scholar 

  8. [8]

    W.H. Press, S.A. Teukolsky, W.T. Vetterling and B.P. Flannery, Numerical Recipes in C++: The Art of Scientific Computing, (Cambridge University Press, Cambridge, 2002).

    Google Scholar 

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Affiliations

  1. McGill University, H3A 2K6, Montreal, Quebec, Canada

    Sairam Prabhakar, Frederic Nabki, Mourad El-Gamal & Srikar Vengallatore

Authors
  1. Sairam Prabhakar
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  2. Frederic Nabki
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  3. Mourad El-Gamal
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  4. Srikar Vengallatore
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Correspondence to Sairam Prabhakar.

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Prabhakar, S., Nabki, F., El-Gamal, M. et al. Measurement and Analysis of Structural Damping in Silicon Carbide Microresonators. MRS Online Proceedings Library 1139, 304 (2008). https://doi.org/10.1557/PROC-1139-GG03-04

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