This paper reports on the characterization of the charge stability of an amorphous fluoropolymer electret called Cytop. Cytop is a dissolved polymer material, compatible with standard micromachining fabrication technologies. In this study, Cytop layers are deposited and patterned on Pyrex and silicon substrates, followed by the electrical poling of the material by corona discharge using a customized charging station. The long-term performance of Cytop as an electret material is evaluated as a function of several relevant charging parameters. The results reveal highly stable layers, able to keep at least 92% of the initial charge 143 days after the corona charging stored at 23°C.
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T. Tsutsumino, Y. Suzuki, N. Kasagi, Y. Sakane : Seismic power generator using highperformance polymer electret, Proc. IEEE MEMS’06, 2006, pp. 98–101.
T. Tsutsumino, Y. Suzuki, N. Kasagi, Y. Tsurumi, High-performance Polymer Electret for Micro Seismic Generator, Proc. Power MEMS Conference, 2005, pp. 9–12.
J. Zubia, J. Arrue : Plastic optical fibers: An introduction to their technological processes and applications, Opt. Fiber Technol. 7, 2001, pp. 101–140.
U. Bartsch, T. Huesgen, J. Gaspar, P. Woias, and O. Paul, Low-temperature Adhesive Flipchip Bonding using Cytop combined with Electrical Stud Bump Interconnects, Tech. Digest MicroMechanics Europe Workshop 2008, pp. 411–414.
Y. Fei, Z. Xu, C. Chen, Charge Storage Stability of SiO2 Film Electret, Proc. IEEE SoutheastCon 2001, pp. 1–7.
T. Oda, Surface Charge Behavior of Corona-Charged Thin Polymer Films, Proc. 12th International Sym. on Electrets, 2005, pp. 188–191.
CYTOP Amorphous Fluoropolymer, Technical Data 2004, Asahi Glass Co., Ltd, Japan.
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Bartsch, U., Gaspar, J. & Paul, O. Characterization of the Charging and Long-Term Performance of Cytop Electret Layers for MEMS Applications. MRS Online Proceedings Library 1134, 817 (2008). https://doi.org/10.1557/PROC-1134-BB08-17