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Characterization of the Charging and Long-Term Performance of Cytop Electret Layers for MEMS Applications

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Abstract

This paper reports on the characterization of the charge stability of an amorphous fluoropolymer electret called Cytop. Cytop is a dissolved polymer material, compatible with standard micromachining fabrication technologies. In this study, Cytop layers are deposited and patterned on Pyrex and silicon substrates, followed by the electrical poling of the material by corona discharge using a customized charging station. The long-term performance of Cytop as an electret material is evaluated as a function of several relevant charging parameters. The results reveal highly stable layers, able to keep at least 92% of the initial charge 143 days after the corona charging stored at 23°C.

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Authors and Affiliations

  1. Microsystem Materials Laboratory, Department of Microsystems Engineering (IMTEK), University of Freiburg, Germany

    U. Bartsch, J. Gaspar & O. Paul

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  1. U. Bartsch
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  2. J. Gaspar
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  3. O. Paul
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Bartsch, U., Gaspar, J. & Paul, O. Characterization of the Charging and Long-Term Performance of Cytop Electret Layers for MEMS Applications. MRS Online Proceedings Library 1134, 817 (2008). https://doi.org/10.1557/PROC-1134-BB08-17

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  • DOI: https://doi.org/10.1557/PROC-1134-BB08-17

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