Carbon-based micro-supercapacitors dedicated to energy storage in self-powered modules were fabricated with inkjet printing technology on silicon substrate. The ink containing activated carbon with particles size ranging from 1 µm to 10 µm, mixed with PTFE and glycol was stabilised with a surfactant, Triton X100. After functionalising the electrodes surroundings with octadecyltrichlorosilane (OTS), the ink was deposited by inkjet on the electrodes with the substrate heated at 140°C in order to assure a good homogeneity. The resulting structures have a resolution of 10 µm. Micro-supercapacitors with the carbon electrodes were tested in acetonitrile and Et4NBF4 dried salts: the capacitance density obtained was 50 µF. cm−2. The newly developed technology will allow the integration of the storage device as close as possible as the MEMS-based energy harvesting device, minimising power losses through connections.
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R.G. Egbert, M.R. Harvey, B.P. Otis, Proc. of the Europ. Thermoelect. Conf. (ECT2007), Odessa, 2007.
S. Roundy, P.K. Wright, Smart Materials and Structures, 13, 1131, (2004).
H. J. In, S. Kumar, Y. Shao-Horn, G. Barbastathis, Appl. Phys. Lett., 88, p. 083104, (2006).
C.C. Ho, D.A. Steingart, J.P. Salminen, W.H. Sin, T.M.K. Rantala, J.W. Evans, P.K. Wright, PowerMEMS Conference, (2006), pp. 219–222.
L. Liu, Y. Zhao, Q. Zhou, H. Xu, C. Zhao, Z. Jiang, J. Solid State Electrochem., 11, pp. 32–37, (2006).
N. Bailly, J-M. Dilhac, C. Escriba, C. Vanhecke, N. Mauran, M. Bafleur, Proc. of 8th Intern. Workshop PowerMEMS 2008 + µMEMS 2008, (9–12 Nov 2008), Sendai, Japan, pp. 205 – 209.
G.A. Ardila Rodriguez, H. Durou, L. Ourak, D. Colin, C. Rossi, C. Baud, J.Y. Fourniols, Proc. of 8th Intern. Workshop PowerMEMS 2008 + µMEMS 2008, (9–12 Nov 2008), Sendai, Japan, pp. 193–197.
C. Portet, P-L. Taberna, P. Simon, E. Flahaut, C. Laberty-Robert, Electrochimica Acta, 50, pp. 4174–4181, (2005).
Aoife Morrin, Orawan Ngamna, Eimer O’ Malley, Nigel Kent, Simon E. Moulton, Gordon G. Wallace, Malcolm R. Smyth, Anthony J. Killard, Electrochimica Acta, 53, pp. 5092–5099, (2008).
T. Kayadanova, A. Miedaner, J.D. Perkins, C. Curtis, J.L. Alleman, D.S. Ginley, Thin Solid Films, 515, pp. 3820–3824, (2007).
Li Yang, Amin Rida, Rushi Vyas, Manos M. Tentzeris, IEEE Trans on Microwave Theory and Techniques, 5, No. 12 (2007).
V. Conédéra, F. Mesnilgrente, M. Brunet, N. Fabre, Proceedings of ICQNM conference, Cancun (2009), to be published.
J. Chmiola, G. Yushin, Y. Gogotsi, C. Portet, P. Simon, P-L. Taberna, Science 313, 1760, (2006).
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Brunet, M., Taberna, PL., Simon, P. et al. Ink-jet printed carbon-based micro-supercapacitor for mobile self-powered modules. MRS Online Proceedings Library 1127, 406 (2008). https://doi.org/10.1557/PROC-1127-T04-06