Ink-jet printed carbon-based micro-supercapacitor for mobile self-powered modules


Carbon-based micro-supercapacitors dedicated to energy storage in self-powered modules were fabricated with inkjet printing technology on silicon substrate. The ink containing activated carbon with particles size ranging from 1 µm to 10 µm, mixed with PTFE and glycol was stabilised with a surfactant, Triton X100. After functionalising the electrodes surroundings with octadecyltrichlorosilane (OTS), the ink was deposited by inkjet on the electrodes with the substrate heated at 140°C in order to assure a good homogeneity. The resulting structures have a resolution of 10 µm. Micro-supercapacitors with the carbon electrodes were tested in acetonitrile and Et4NBF4 dried salts: the capacitance density obtained was 50 µF. cm−2. The newly developed technology will allow the integration of the storage device as close as possible as the MEMS-based energy harvesting device, minimising power losses through connections.

This is a preview of subscription content, access via your institution.

We’re sorry, something doesn't seem to be working properly.

Please try refreshing the page. If that doesn't work, please contact support so we can address the problem.


  1. 1.

    R.G. Egbert, M.R. Harvey, B.P. Otis, Proc. of the Europ. Thermoelect. Conf. (ECT2007), Odessa, 2007.

  2. 2.

    S. Roundy, P.K. Wright, Smart Materials and Structures, 13, 1131, (2004).

    Article  Google Scholar 

  3. 3.

    H. J. In, S. Kumar, Y. Shao-Horn, G. Barbastathis, Appl. Phys. Lett., 88, p. 083104, (2006).

    Article  Google Scholar 

  4. 4.

    C.C. Ho, D.A. Steingart, J.P. Salminen, W.H. Sin, T.M.K. Rantala, J.W. Evans, P.K. Wright, PowerMEMS Conference, (2006), pp. 219–222.

  5. 5.

    L. Liu, Y. Zhao, Q. Zhou, H. Xu, C. Zhao, Z. Jiang, J. Solid State Electrochem., 11, pp. 32–37, (2006).

    CAS  Article  Google Scholar 

  6. 6.

    N. Bailly, J-M. Dilhac, C. Escriba, C. Vanhecke, N. Mauran, M. Bafleur, Proc. of 8th Intern. Workshop PowerMEMS 2008 + µMEMS 2008, (9–12 Nov 2008), Sendai, Japan, pp. 205 – 209.

  7. 7.

    G.A. Ardila Rodriguez, H. Durou, L. Ourak, D. Colin, C. Rossi, C. Baud, J.Y. Fourniols, Proc. of 8th Intern. Workshop PowerMEMS 2008 + µMEMS 2008, (9–12 Nov 2008), Sendai, Japan, pp. 193–197.

  8. 8.

  9. 9.

  10. 10.

    C. Portet, P-L. Taberna, P. Simon, E. Flahaut, C. Laberty-Robert, Electrochimica Acta, 50, pp. 4174–4181, (2005).

    CAS  Article  Google Scholar 

  11. 11.

    Aoife Morrin, Orawan Ngamna, Eimer O’ Malley, Nigel Kent, Simon E. Moulton, Gordon G. Wallace, Malcolm R. Smyth, Anthony J. Killard, Electrochimica Acta, 53, pp. 5092–5099, (2008).

    CAS  Article  Google Scholar 

  12. 12.

    T. Kayadanova, A. Miedaner, J.D. Perkins, C. Curtis, J.L. Alleman, D.S. Ginley, Thin Solid Films, 515, pp. 3820–3824, (2007).

    Article  Google Scholar 

  13. 13.

    Li Yang, Amin Rida, Rushi Vyas, Manos M. Tentzeris, IEEE Trans on Microwave Theory and Techniques, 5, No. 12 (2007).

  14. 14.

    V. Conédéra, F. Mesnilgrente, M. Brunet, N. Fabre, Proceedings of ICQNM conference, Cancun (2009), to be published.

  15. 15.

    J. Chmiola, G. Yushin, Y. Gogotsi, C. Portet, P. Simon, P-L. Taberna, Science 313, 1760, (2006).

    CAS  Article  Google Scholar 

Download references

Author information



Corresponding author

Correspondence to Magali Brunet.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Brunet, M., Taberna, PL., Simon, P. et al. Ink-jet printed carbon-based micro-supercapacitor for mobile self-powered modules. MRS Online Proceedings Library 1127, 406 (2008).

Download citation