Abstract
Carbon-based micro-supercapacitors dedicated to energy storage in self-powered modules were fabricated with inkjet printing technology on silicon substrate. The ink containing activated carbon with particles size ranging from 1 µm to 10 µm, mixed with PTFE and glycol was stabilised with a surfactant, Triton X100. After functionalising the electrodes surroundings with octadecyltrichlorosilane (OTS), the ink was deposited by inkjet on the electrodes with the substrate heated at 140°C in order to assure a good homogeneity. The resulting structures have a resolution of 10 µm. Micro-supercapacitors with the carbon electrodes were tested in acetonitrile and Et4NBF4 dried salts: the capacitance density obtained was 50 µF. cm−2. The newly developed technology will allow the integration of the storage device as close as possible as the MEMS-based energy harvesting device, minimising power losses through connections.
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References
- 1.
R.G. Egbert, M.R. Harvey, B.P. Otis, Proc. of the Europ. Thermoelect. Conf. (ECT2007), Odessa, 2007.
- 2.
S. Roundy, P.K. Wright, Smart Materials and Structures, 13, 1131, (2004).
- 3.
H. J. In, S. Kumar, Y. Shao-Horn, G. Barbastathis, Appl. Phys. Lett., 88, p. 083104, (2006).
- 4.
C.C. Ho, D.A. Steingart, J.P. Salminen, W.H. Sin, T.M.K. Rantala, J.W. Evans, P.K. Wright, PowerMEMS Conference, (2006), pp. 219–222.
- 5.
L. Liu, Y. Zhao, Q. Zhou, H. Xu, C. Zhao, Z. Jiang, J. Solid State Electrochem., 11, pp. 32–37, (2006).
- 6.
N. Bailly, J-M. Dilhac, C. Escriba, C. Vanhecke, N. Mauran, M. Bafleur, Proc. of 8th Intern. Workshop PowerMEMS 2008 + µMEMS 2008, (9–12 Nov 2008), Sendai, Japan, pp. 205 – 209.
- 7.
G.A. Ardila Rodriguez, H. Durou, L. Ourak, D. Colin, C. Rossi, C. Baud, J.Y. Fourniols, Proc. of 8th Intern. Workshop PowerMEMS 2008 + µMEMS 2008, (9–12 Nov 2008), Sendai, Japan, pp. 193–197.
- 8.
http://www.st.com/stonline/products/literature/ds/11115/lis3lv02dq.pdf.
- 9.
http://industrial.panasonic.com/wwwcgi/jvcr13pz.cgi?E+PZ+3+ABC0019+EECEN0F204A+7+WW.
- 10.
C. Portet, P-L. Taberna, P. Simon, E. Flahaut, C. Laberty-Robert, Electrochimica Acta, 50, pp. 4174–4181, (2005).
- 11.
Aoife Morrin, Orawan Ngamna, Eimer O’ Malley, Nigel Kent, Simon E. Moulton, Gordon G. Wallace, Malcolm R. Smyth, Anthony J. Killard, Electrochimica Acta, 53, pp. 5092–5099, (2008).
- 12.
T. Kayadanova, A. Miedaner, J.D. Perkins, C. Curtis, J.L. Alleman, D.S. Ginley, Thin Solid Films, 515, pp. 3820–3824, (2007).
- 13.
Li Yang, Amin Rida, Rushi Vyas, Manos M. Tentzeris, IEEE Trans on Microwave Theory and Techniques, 5, No. 12 (2007).
- 14.
V. Conédéra, F. Mesnilgrente, M. Brunet, N. Fabre, Proceedings of ICQNM conference, Cancun (2009), to be published.
- 15.
J. Chmiola, G. Yushin, Y. Gogotsi, C. Portet, P. Simon, P-L. Taberna, Science 313, 1760, (2006).
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Brunet, M., Taberna, PL., Simon, P. et al. Ink-jet printed carbon-based micro-supercapacitor for mobile self-powered modules. MRS Online Proceedings Library 1127, 406 (2008). https://doi.org/10.1557/PROC-1127-T04-06
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