Sb-Doped Polycrystalline Si Obtained by Means of Sb and Si Thin-Film Reactions

Abstract

We have grown Sb-doped poly-Si by thin-film reactions between Sb and amorphous Si (a-Si). The reactions and microstructures of the films were investigated by transmission electron microscopy (TEM) during in situ annealing and Auger electron spectroscopy (AES). The reactions either resulted in an amorphous Sb-Si (a-Sb-Si) alloy or caused crystallization of a-Si at low temperatures, depending on the film thickness of the a-Si layer as well as the heating rate. The electrical properties of the as-deposited and the annealed thin multi-layers deposited on SiO2 layer were determined using Hall measurements. After annealing at 1375 K for 60 minutes, Sb-doped poly-Si with a resistivity of 1.4×10−2 ohm•cm was obtained. A p-n junction was formed in a p-type Si substrate by using an a-Si/Sb/a-Si multi-layer as a diffusion source. The doping concentration in the Si substrate was obtained using secondary ion mass spectrometry (SIMS).

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Gong, S.F., Robertsson, A.E., Hörnström, S.E. et al. Sb-Doped Polycrystalline Si Obtained by Means of Sb and Si Thin-Film Reactions. MRS Online Proceedings Library 106, 193 (1987). https://doi.org/10.1557/PROC-106-193

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