Nanohole and Nanopillar Arrays on GaAs and GaSb Using Nanosphere Lithography and Bromine Ion Beam Assisted Etching

Abstract

Nanosphere lithography (NSL) has been successfully used to nanopattern silicon and glass substrate surfaces using a spin process in conjunction with the chemical functionalized polystyrene nanospheres. Here, we report for the first time the formation of periodic arrays of nanohole and nanopillar on GaAs and GaSb substrates using a combination of NSL, electron beam (E-Beam) evaporation and Bromine Ion Beam Assisted Etching (Br-IBAE). When 250 nm diameter nanospheres were used as a template or mask, periodic arrays of approximate 55 nm hexagonal nanoholes and 39 nm hexagonal nanopillars were obtained from double-layer nanosphere templates, while arrays of approximate 65nm triangular nanohole and 53nm triangular nanopillar were obtained from single-layer nanosphere templates. The high uniformity of these nanohole and nanopillar arrays demonstrates the technique¡¦s potential for applications in the fabrication of novel high performance opto- and electronic devices in the important GaAs and GaSb III-V direct bandgap semiconductors.

This is a preview of subscription content, access via your institution.

References

  1. 1.

    P. Rossel, J. J Cabot, J. Graffeuil, Appl. Phys. Lett., 25, 510–511 (1974)

    CAS  Article  Google Scholar 

  2. 2.

    E. S Harmon, D. T Mclnturff, M. R Melloch, J. M Woodall, J. Vac. Sci. Tech. B, 13, 768–770 (1995)

    CAS  Article  Google Scholar 

  3. 3.

    E. A Semykina, K. S. Rose, J. Appl. Phys., 82, 670–676 (1997)

    CAS  Article  Google Scholar 

  4. 4.

    D. C Sun, S. R Friberg, K. Watanabe, S. Machida, Y. Horikoshi, Y. Yamamoto, Appl. Phys. Lett., 61, 1502–1503 (1992)

    CAS  Article  Google Scholar 

  5. 5.

    T. Ito, S. Okazaki, Nature, 406, 1027–1031 (2000)

    CAS  Article  Google Scholar 

  6. 6.

    H. I Smith, M. L Schattenburg, IBM J. Res. Develop, 37, 319–329 (1993)

    CAS  Article  Google Scholar 

  7. 7.

    K. Arshak, M. Mihov, J. Optoelec. Adv. Mat., 7, 193–198 (2005)

    CAS  Google Scholar 

  8. 8.

    M. Campbell, D.N. Sharp, M. T Harrison, R. G Denning, A. J Turberfield, Nature, 404, 53 (2000)

    CAS  Article  Google Scholar 

  9. 9.

    N.D. Denkov, Nature, 361, 26, 1993

    Article  Google Scholar 

  10. 10.

    W. Li, L. Xu, W. M Zhao, P. Sun, X. F Huang, K. J Chen, Appl. Sur. Sci. 253, 9035–9038 (2007)

    CAS  Article  Google Scholar 

  11. 11.

    J. C Hulteen, R. P. Van Duyne, J. Vac. Sci. Technol. A, 13, 1553–1558 (1995)

    Article  Google Scholar 

  12. 12.

    A. Kosiorek, W. Kandulski, H. Glaczynska, and M. Giersig, small, 1, 439–444 (2005)

    CAS  Article  Google Scholar 

  13. 13.

    K. H Park, S. Lee, K. H Koh, R. Lacerda, K. B. K. Teo, W. I Milne, J. Appl. Phys., 97, 024311 (2005)

    Article  Google Scholar 

  14. 14.

    W. D Goodue, Y. Royter, D. E Mull, S. S Choi, C. G Fonstad, J. Elec. Mat., 28, 364–368 (1999)

    Article  Google Scholar 

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to Xifeng Qian.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Qian, X., Li, J. & William, D.G. Nanohole and Nanopillar Arrays on GaAs and GaSb Using Nanosphere Lithography and Bromine Ion Beam Assisted Etching. MRS Online Proceedings Library 1059, 1110 (2007). https://doi.org/10.1557/PROC-1059-KK11-10

Download citation