Rapid Thermal Processing of Thin Film Electroluminescent Display Materials


Rapid thermal annealing of the electroluminescent phosphors ZnS:Mn, SrS:CeF3 and ZnS:SmCl3 has been examined as a function of annealing temperature (500–750°C) and time of exposure (10–120 sec.). The resulting brightness and efficiency of luminescence are correlated with the different processing conditions used. The results indicate that the brightness can be significantly improved from the value obtained with furnace annealing without causing film delamination, blistering or fatigue effect.

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Correspondence to D. M. Kim.

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Kim, D.M., Qian, F., Solanki, R. et al. Rapid Thermal Processing of Thin Film Electroluminescent Display Materials. MRS Online Proceedings Library 100, 743 (1987). https://doi.org/10.1557/PROC-100-743

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