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Nucleation in Amorphous Si:H Alloy

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A method of producing microcrystalline material from thin films of hydrogenated amorphous silicon was investigated. Exposure to gamma and neutron radiation, and silicon self ion implantation were used to induce nucleation in the amorphous material. According to the preliminary results, neutron irradiation represents a most promising method for promoting crystallization.

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References

  1. P.H.Fang, P.Bai, J.H.Kinnier, Z.Huan and C.C.Schnbert; J. Non-Cryst. Solids, Vol.59 60, 1983, p.819

    Google Scholar 

  2. Y.Hamakawa, MRS Symp., Vol. 49, MRS press, 1985, p.239

  3. Y.Hamakawa, IEEE 1984, p.63

  4. Y.Hamakawa, SPIE Vol.543, 1985, p.74

  5. Y.Kuwano, MRS Spring Meeting, 1986

  6. Y.C. Koo, A.R. Perrin, K.T. Aust and S.Zukotynski, "RADIATION INDUCED CRYSTALLIZATION OF AMORPHOUS Si:H ALLOY", Met. Tran. A, in press.

  7. Y.C. Koo, S.Zukotynski, A.R. Perrin and K.T. Aust, "THE EFFECTS OF THE GLASS SUBSTRATE ON THE PROPERTIES OF RF GLOW DISCHARGE a-Si:H THIN FILMS", Communications of the J. Appl. Physics, in press.

  8. HANDBOOK OF CHEMISTRY AND PHYSICS, 63rd edition 1982–1983, CRC Press, Ohio, 1983

  9. M.Hansen, CONSTITUTION OF BINARY ALLOYS, 2nd edition, McGraw-Hill Press, N.Y. 1958, p. 1004

    Google Scholar 

  10. R.P.Elliott, CONSTITUTION OF BINARY ALLOYS, FIRST SUPPLEMENT, McGraw-Hill Press, N.Y. 1965, p.650

    Google Scholar 

  11. ibid.p.570

    Google Scholar 

  12. S.Hayashi, S.Yamasaki, A.Matsuda and K.Tanaka; J. Non-Cryst. Solids, Vol.5960, 1983, p.799

  13. N.Ababou, E.Bustarret, A.Deneuville and M.Toulemonde; J.Non-Cryst. Solids, Vol. 5960, 1983, p.803

  14. J.N.Anno, NOTES ON RADIATION EFFECTS ON MATERIALS, Hemisphere Press, N.Y. 1984, p. 12

    Google Scholar 

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Authors and Affiliations

  1. Dept. of Metallurgy and Materials Science, University of Toronto, Toronto, Ont., M5S 1A4, Canada

    Y. C. Koo, A. R. Perrin & K. T. Aust

  2. University of Toronto, Dept. of Electrical Engineering, Toronto, Ont., M5S 1A4, Canada

    S. Zukotynski

Authors
  1. Y. C. Koo
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  2. A. R. Perrin
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  3. K. T. Aust
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  4. S. Zukotynski
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Koo, Y.C., Perrin, A.R., Aust, K.T. et al. Nucleation in Amorphous Si:H Alloy. MRS Online Proceedings Library 100, 429 (1987). https://doi.org/10.1557/PROC-100-429

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  • DOI: https://doi.org/10.1557/PROC-100-429

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