Molecular Dynamics Simulation of Sputtering with Mmany-Body Interactions

Abstract

Many-body forces obtained by the Embedded-Atom Method (EAM) [41 are incorporated into the description of low energy collisions and surface ejection processes in molecular dynamics simulations of sputtering from metal targets. Bombardments of small, single crystal Cu targets (400–500 atoms) in three different orientations ({100}, {110}, {111}) by 5 keV Ar+ ions have been simulated. The results are compared to simulations using purely pair-wise additive interactions. Significant differences in the spectra of ejected atoms are found.

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Correspondence to Davy Y. Lo.

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Lo, D.Y., Tombrello, T.A., Shapiro, M.H. et al. Molecular Dynamics Simulation of Sputtering with Mmany-Body Interactions. MRS Online Proceedings Library 100, 145 (1987). https://doi.org/10.1557/PROC-100-145

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