Molecular Dynamics Simulation of Sputtering with Mmany-Body Interactions

MRS Online Proceedings Library volume 100, Article number: 145 (1987) Cite this article

Abstract

Many-body forces obtained by the Embedded-Atom Method (EAM) [41 are incorporated into the description of low energy collisions and surface ejection processes in molecular dynamics simulations of sputtering from metal targets. Bombardments of small, single crystal Cu targets (400–500 atoms) in three different orientations ({100}, {110}, {111}) by 5 keV Ar+ ions have been simulated. The results are compared to simulations using purely pair-wise additive interactions. Significant differences in the spectra of ejected atoms are found.

This is a preview of subscription content, access via your institution.

Access options

Buy single article

Instant access to the full article PDF.

US$ 39.95

Tax calculation will be finalised during checkout.

References

  1. 1.

    D. Ε. Harrison, Jr., Radiat. Eff. 70, 1 (1983).

    CAS  Article  Google Scholar 

  2. 2.

    L. A. Girifalco and V. G. Weizer, Phys. Rev. 114, 687 (1959).

    CAS  Article  Google Scholar 

  3. 3.

    K. P. Huber and G. Herzberg, Molecular Spectra and Molecular Structure, (Van Nostrand Reinhold Co., New York, 1492).

  4. 4.

    M. S. Daw and M. I. Baskes, Phys. Rev. Β 29, 6443 (1984).

    CAS  Article  Google Scholar 

  5. 5.

    Β. J. Garrison, N. Winograd, D. M. Deaven, C. T. Reimann, D. Y. Lo, T. A. Tombrello, D. E. Harrison, Jr., and M. H. Shapiro, presented at SIMS IV, France, 1987.

  6. 6.

    S. M. Foiles, M. I. Baskes, and M. S. Daw, Phys. Rev. Β 33, 7983 (1986).

    CAS  Article  Google Scholar 

  7. 7.

    D. P. Jackson, Radiat. Eff. 18, 185 (1973).

    CAS  Article  Google Scholar 

  8. 8.

    B. J. Garrison, N. Winograd, C. T. Reimann, and D. E. Harrison, Jr., Phys. Rev. B36, 3516 (1987).

    Article  Google Scholar 

  9. 9.

    B. J. Garrison, N. Winograd, D. Y. Lo, T. A. Tombrello, M. H. Shapiro, and D. E. Harrison, Jr., Surf. Sci. 180, L129 (1987).

    CAS  Article  Google Scholar 

  10. 10.

    R. Kelly, Nucl. Instr. and Meth. B18, 388 (1987).

    CAS  Google Scholar 

  11. 11.

    J. P. Baxter, G. A. Schick, J. Singh, P. H. Kobrin, and N. Winograd, J. Vac. Sci. Tech. 4, 1218 (1986).

    CAS  Article  Google Scholar 

  12. 12.

    M. W. Thompson, Phil. Mag. 18, 377 (1968).

    CAS  Article  Google Scholar 

  13. 13.

    P. Sigmund, Phys. Rev. 184, 383 (1969).

    CAS  Article  Google Scholar 

Download references

Author information

Affiliations

  1. Division of Physics, Mathematics, and Astronomy, 200-36 California Institute of Technology, Pasadena, CA, 91125, USA

    Davy Y. Lo, Tom A. Tombrello & Mark H. Shapiro

  2. Department of Physics, US Naval Postgraduate School, Monterey, CA, 93940, USA

    Don E. Harrison Jr.

Authors
  1. Davy Y. Lo
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Tom A. Tombrello
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Mark H. Shapiro
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Don E. Harrison Jr.
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Davy Y. Lo.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Lo, D.Y., Tombrello, T.A., Shapiro, M.H. et al. Molecular Dynamics Simulation of Sputtering with Mmany-Body Interactions. MRS Online Proceedings Library 100, 145 (1987). https://doi.org/10.1557/PROC-100-145

Download citation