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Molecular Dynamics Simulation of Sputtering with Mmany-Body Interactions

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Abstract

Many-body forces obtained by the Embedded-Atom Method (EAM) [41 are incorporated into the description of low energy collisions and surface ejection processes in molecular dynamics simulations of sputtering from metal targets. Bombardments of small, single crystal Cu targets (400–500 atoms) in three different orientations ({100}, {110}, {111}) by 5 keV Ar+ ions have been simulated. The results are compared to simulations using purely pair-wise additive interactions. Significant differences in the spectra of ejected atoms are found.

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Authors and Affiliations

  1. Division of Physics, Mathematics, and Astronomy, 200-36 California Institute of Technology, Pasadena, CA, 91125, USA

    Davy Y. Lo, Tom A. Tombrello & Mark H. Shapiro

  2. Department of Physics, US Naval Postgraduate School, Monterey, CA, 93940, USA

    Don E. Harrison Jr.

Authors
  1. Davy Y. Lo
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  2. Tom A. Tombrello
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  3. Mark H. Shapiro
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  4. Don E. Harrison Jr.
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Lo, D.Y., Tombrello, T.A., Shapiro, M.H. et al. Molecular Dynamics Simulation of Sputtering with Mmany-Body Interactions. MRS Online Proceedings Library 100, 145 (1987). https://doi.org/10.1557/PROC-100-145

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