Pulsed Laser Annealing of Aluminum

Abstract

Pulsed ruby laser irradiation of unimplanted single crystal and implanted polycrystalline Al has been studied with ion beam analysis and TEM. The results show that Al is melted to a depth of ∼ 0.9 µm with a 4.2 J/cm2, 15 nsec pulse, and that vacancies are quenched into Al during resolidification. Diffusion of Zn in liquid Al is observed, and a melt time of ∼ 65 nsec is estimated for a 3.8 J/cm2, 30 nsec pulse. The observations are in reasonable agreement with calculations of sample temperature and melt times. We observe no precipitation of AlSb in liquid Al for Sbimplanted Al, and conclude that the nucleation time satisfies 50 nsec ≲ tnuc ≲ 200 nsec. We find no evidence for amorphous Al after irradiation of single crystal Al with energies ≳ 1.5 J/cm2.

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References

  1. 1.

    Laser-Solid Interactions and Laser Processing, 1978, eds. S. B. Ferris, H. J. Leamy, and J. M. Poate, AIP Conference Proceedings No. 50.

  2. 2.

    Laser and Electron Beam Processing of Materials, eds. C. W. White and P. S. Peercy (Academic Press, New York, 1980).

    Google Scholar 

  3. 3.

    W. R. Wampler, D. M. Follstaedt, and S. T. Picraux, Appl. Phys. Lett. 36, 366 (1980).

    CAS  Article  Google Scholar 

  4. 4.

    D. M. Follstaedt and W. R. Wampler, Appl. Phys. Lett., in press.

  5. 5.

    A. Cullis, H. C. Webber, and P. Bailey, J. Phys. E. Sci. Instrum. 12, 688 (1979).

    CAS  Article  Google Scholar 

  6. 6.

    P. Mazzoldi, G. Della Mea, G. Battaglin, A. Miotello, M. Servidori, D. Bacci, and E. Jannitti, Phys. Rev. Lett. 44, 88 (1980).

    CAS  Article  Google Scholar 

  7. 7.

    L. Buene, J. M. Poate, D. C. Jacobsen, C. W. Draper, and J. K. Hirvonen, Appl. Phys. Lett. 37, 385 (1980).

    CAS  Article  Google Scholar 

  8. 8.

    J. B. Edwards, E. E. Hucke, and J. J. Martin, Metallurgical Reviews (No. 120) 13, 1 (1968).

    Google Scholar 

  9. 9.

    N. L. Peterson and S. J. Rothman, Phys. Rev. B 1, 3264 (1970).

    Article  Google Scholar 

  10. 10.

    A. K. Jain, V. N. Kulkarni, D. K. Sood, M. Sundararaman, and R. D. S. Yadav, Nucl. Inst. and Meth. 168, 275 (1980).

    CAS  Article  Google Scholar 

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Correspondence to W. R. Wampler.

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This work was supported by the U. S. Department of Energy under Contract DE-AC04-76-DP00789.

A U. S. Department of Energy facility.

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Wampler, W.R., Follstaedt, D.M. & Peercy, P.S. Pulsed Laser Annealing of Aluminum. MRS Online Proceedings Library 1, 567 (1980). https://doi.org/10.1557/PROC-1-567

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