Integration of PZT on SOI Wafers: Increasing Piezoelectric Film Thickness for Providing a Wide Range of Ultrasonic MEMS Applications

Abstract

Piezoelectric micromachined ultrasonic transducers comprising a 10 μm thick Si device layer and a 1-4 μm thick piezoelectric PZT layer were investigated. The PZT films were deposited by a sol-gel technique. The transverse piezoelectric coefficient was measured as -14.9 C/m2. The electromechanical coupling increased with PZT thickness, as expected. The influence of both the shape and area of the top electrode on the device performance has been investigated. The electromechanical coupling coefficient (k) and quality factor (Q) have been measured in air and were fitted to an equivalent circuit model. The maximal k2 was obtained as 7.8%.

This is a preview of subscription content, access via your institution.

References

  1. 1

    P. Muralt, IEEE Trans. on UFFC, (47) 903–915, 2000.

    CAS  Article  Google Scholar 

  2. 2

    S. Yuan et al, Sens. and Act. A 108, 182–186, 2003.

    CAS  Article  Google Scholar 

  3. 3

    P. Muralt, J. Micromech. Microeng. (10) 136–146, 2000.

    CAS  Article  Google Scholar 

  4. 4

    B. Belgacem et al, 2006 IEEE Inter. Ultra. Symp. in Vancouver, in press

  5. 5

    T. Maeder et al, British Ceramic Proc. 54, pp. 207–218, 1995.

    CAS  Google Scholar 

  6. 6

    S. Hiboux et al, Mater. Res. Soc. Symp. Proc., 595, pp.499–504, 2000.

    Google Scholar 

  7. 7

    M.-A. Dubois et al, Sensors and Actuators, A 77, 106–112, 1999.

    CAS  Article  Google Scholar 

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to Brahim Belgacem.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Belgacem, B., Calame, F. & Muralt, P. Integration of PZT on SOI Wafers: Increasing Piezoelectric Film Thickness for Providing a Wide Range of Ultrasonic MEMS Applications. MRS Online Proceedings Library 969, 509 (2006). https://doi.org/10.1557/PROC-0969-W05-09

Download citation