Abstract
Real-time observation of self-assembled (SA) InAs quantum dot (QD) growth on GaAs(001) by MBE has been performed. Through transient measurements on reflection high energy electron diffraction (RHEED) specular beam, we obtain information about nucleation and evolution of the QDs in situ, in contrast to most previous reports that required growth interruption. Based on the observation, we have been able to distinguish processes that are dependent and independent of growth rate. In addition, the results reveal that surface migration of In/As atoms and their incorporation into QDs, with the aid of the wetting layer, can be observed. We also provide a quantitative discussion on these processes.
Similar content being viewed by others
References
Y. Arakawa and H. Sakaki, Appl. Phys. Lett. 40, 939 (1982).
H. Sakaki, Surf. Sci. 267, 623 (1992); H. Sakaki, Solid State Commun. 92, 119 (1994).
D. Leonard, M. Krishnamurthy, C. M. Reaves, S. P. Denbaars, and P. M. Petroff, Appl. Phys. Lett. 63, 3203 (1993).
J. M. Moison, F. Houzay, F. Barthe, L. Leprince, E. André, and O. Vatel, Appl. Phys. Lett. 64, 196 (1994).
A. Madhukar, Q. Xie, P. Chen, and A. Konkar, Appl. Phys. Lett. 64, 2727 (1994).
M. Grundmann, O. Stier, and D. Bimberg, Phys. Rev. B52, 11969 (1995).
I. Kamiya, I. Tanaka, and H. Sakaki, J. Cryst. Growth 201/202, 1146 (1999).
I. Kamiya, I. Tanaka, O. Ohtsuki, and H. Sakaki, Physica E13, 1172 (2002).
K. Yamaguchi, K. Yujobo, and T. Kaizu, Jpn. J. Appl. Phys. 39, L1245 (2000).
T. Kaizu and K. Yamaguchi, Jpn. J. Appl. Phys. 40, 1885 (2001).
T. Kaizu and K. Yamaguchi, Jpn. J. Appl. Phys. 42, 1705 (2003).
T. Kaizu and K. Yamaguchi, Jpn. J. Appl. Phys. 42, 4166 (2003).
I. K. Robinson, Phys. Rev. B33, 3830 (1986).
T. Hanada, B-H. Koo, H. Totsuka, and T. Yao, Phys. Rev. B64, 165307 (2001).
T. R. Ramachandran, R. Heitz, P. Chen, and A. Madhukar, Appl. Phys. Lett. 70, 640 (1997).
T. R. Ramachandran, R. Heitz, N. P. Kobayashi, A. Kalburge, W. Yu, P. Chen, and A. Madhukar, J. Cryst. Growth 175/176, 216 (1997).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Kamiya, I., Matsuura, K. & Higashinakagawa, T. Real-time Observation of Nucleation and Evolution of InAs Quantum Dots on GaAs(001) During MBE. MRS Online Proceedings Library 959, 1711 (2006). https://doi.org/10.1557/PROC-0959-M17-11
Received:
Accepted:
Published:
DOI: https://doi.org/10.1557/PROC-0959-M17-11