Optical Properties of Si and Ge/Si Nanocrystals in Silicon Oxide Matrix


The contribution of oxide-related emission in Photoluminescence (PL) spectra from Ge and Si nanocrystals mixture embedded in silicon oxide (Ge/Si-SiO2) and Si nanocrystals embedded in silicon oxide (Si-SiO2) thin film prepared by RF-magnetron co-sputtering method is investigated. All as-deposited thin films were annealed for 1 hour in the temperature range from 300 to 1100 °C in an Ar atmosphere. The samples were evaluated by using PL, Energy dispersive spectroscopy (EDX), Raman scattering and X-ray photoelectron spectroscopy (XPS) measurements. All the measurements were performed at room temperature. The maximum PL intensity of Ge+Si-SiO2 mixture thin film has increased more than the Si-SiO2 thin film by approximately 10 times. From the results of Raman scattering and XPS measurements, it is consider that the oxygen defect centers in the host material SiO2 increased by the diffusion of Ge. An increase in the PL intensity of Ge+Si-SiO2 mixture thin film is systematically discussed.

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  1. 1.

    Suk-ho Choi, Sung-chul Han and Suntae Hwang, Thin Solid Films 413, 177 (2002).

    CAS  Article  Google Scholar 

  2. 2.

    J. Li, X.L. Wu, Y.M. Yang, X. Yang and X.M. Bao, Physics Letters A 314, 299 (2003).

    CAS  Article  Google Scholar 

  3. 3.

    L. Khomenkova, N. Korsunska, T. Torchynska, V. Yukhimchuk, B. Jumayev, A. Many, Y. Goldstein, E. Savir and J. Jedrzejewski, Journal of Physics: Condensed Matter 14, 13217 (2002).

    CAS  Google Scholar 

  4. 4.

    X.M. Wu, M.J. Lu and W.G. Yao, Surface and Coatings Technology 161, 92 (2002).

    CAS  Article  Google Scholar 

  5. 5.

    Korsunska, M. Baran, L. Khomenkova, V. Yukhymchuk, Y. Goldstein, E. Savir and J. Jedrzejewski, Materials Science and Engineering C 23, 691 (2003).

    Article  Google Scholar 

  6. 6.

    H.Z. Song, X.M. Bao and G.J. Adriaenssens, Physics Letters A 244, 449 (1998).

    CAS  Article  Google Scholar 

  7. 7.

    A. Zatsepin, V.S. Kortov and H.-J. Fitting, Journal of Non-Crystalline Solids 351, 869 (2005).

    CAS  Article  Google Scholar 

  8. 8.

    S.M. Prokes and W.E. Carlos, Journal of Applied Physics 78, 2671 (1995).

    CAS  Article  Google Scholar 

  9. 9.

    P.K. Giri, R. Kesavamoorthy, S. Bhattacharya, B.K. Panigrahi and K.G.M. Nair, Materials Science and Engineering B 128, 201 (2006).

    CAS  Article  Google Scholar 

  10. 10.

    Atif Mossad Ali, Journal of Non-Crystalline Solids 352, 3126 (2006).

    CAS  Article  Google Scholar 

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Correspondence to Shin-ichiro Uekusa.

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Uekusa, Si., Kushida, A. Optical Properties of Si and Ge/Si Nanocrystals in Silicon Oxide Matrix. MRS Online Proceedings Library 958, 1028 (2006). https://doi.org/10.1557/PROC-0958-L10-28

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