Effects of High D.C. Hias Voltage on the Properties of Diamond-Like Carbon Films

Abstract

Diamond-like carbon (DLC) films were synthesized using pulsed plasma sputtering deposition techniques. Microscope and Raman scattering techniques were used to study the effects of bias voltages on the properties of diamond-like carbon films. With d.c. bias voltage up to 1000V, the smooth and thick DLC films together with a few nanoparticles were obtained. An increase of the d.c. bias voltage up to 2000V yielded thicker DLC films but its surface became slightly rough and size of particles became large. The crystalline properties of these particles were studied. A tiny diamond peak from Raman spectrum was also observed.

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Correspondence to Boqian Yang.

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Yang, B., Zhang, H., Wang, X. et al. Effects of High D.C. Hias Voltage on the Properties of Diamond-Like Carbon Films. MRS Online Proceedings Library 956, 901 (2006). https://doi.org/10.1557/PROC-0956-J09-01

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