Abstract
Diamond-like carbon (DLC) films were synthesized using pulsed plasma sputtering deposition techniques. Microscope and Raman scattering techniques were used to study the effects of bias voltages on the properties of diamond-like carbon films. With d.c. bias voltage up to 1000V, the smooth and thick DLC films together with a few nanoparticles were obtained. An increase of the d.c. bias voltage up to 2000V yielded thicker DLC films but its surface became slightly rough and size of particles became large. The crystalline properties of these particles were studied. A tiny diamond peak from Raman spectrum was also observed.
Similar content being viewed by others
References
A.C. Ferrari, and J. Robertson, Phys. Rev. B 64 (2001) 075414.
J.P. Sulllivan, T.A. Friedmann, and K. Hjort, MRS Bull. 26 (2001) 309.
J.K. Luo, A.J. Flewitt, S.M. Spearing, N.A. Fleck, and W.I. Milne, Appl.Phys.Lett. 85 (2004) 5748.
M Ishihara, M Suzuki, T Watanabe, Diamond and Related Materials 14 (2005) 989–993.
K Bewilogua, R Wittorf, H Thomsen, Thin Solid Films 447 (2004) 142–147.
N Laidani, R Bartali, P. Tosi, J. Phys. D 37 (2004) 2593–2606.
S Adhikari., AMM Omer., S Adhikary., M. Rusop, H. Uchida, T. Soga, M. Umeno, Diamond and Related Materials 15 (2006) 913–916.
M Noda., M Umeno., Coating of DLC film by pulsed discharge plasma CVD, Diamond and Related Materials 14 (2005) 1791–1794.
TV Kononenko., VV Kononenko., SM Pimenov., E.V. Zavedeev., V.I. Konov., V. Romano., G. Dumitru, Diamond and Related Materials 14 (2005) 1368–1376.
JM Lackner, C Stotter, W Waldhauser., R. Ebner, W. Lenz, and M. Beutlet ., Surf. Coat. Tech. 174–175 (2003) 402–407.
X Yu, CB Wang, Y Liu, Diamond and Related Materials 15 (2006) 1223–1227.
AA Onoprienko, IB Yanchuk, Powder Metallurgy and Metal Ceramics 45 (2006) 190–195.
M Rusop, S Abdullah, J Podder, Surface Review and Letters 13 (2006) 7–12.
B.Q. Yang, H.Y. Li, Y.C. Shi, and P.X. Feng, Surface Review and Letters, 13 (2006) (in press).
P.X. Feng, P. Yang and Y.C. Shi, Journal of Crystal Growth 291 (2006) 22–26.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Yang, B., Zhang, H., Wang, X. et al. Effects of High D.C. Hias Voltage on the Properties of Diamond-Like Carbon Films. MRS Online Proceedings Library 956, 901 (2006). https://doi.org/10.1557/PROC-0956-J09-01
Received:
Accepted:
Published:
DOI: https://doi.org/10.1557/PROC-0956-J09-01