Abstract
In this work, we report on nucleation and growth of polycrystalline silicon thin-film on glass substrate synthesized by ceramics hot wire chemical vapor deposition. We observed perfect geometrical patterns at the surface topography of these films, i.e. “five-fold” symmetry and “sixfold” symmetry. We found “confinement of heat and photon” is a new technique in developing silicon thin-film with novel structure, i.e. quasicrystalline silicon thin-film on glass substrate. The influence of photons emitted from the hot filament on fast nucleation of nanocrystal silicon on glass substrate has been discussed.
This is a preview of subscription content, access via your institution.
References
- 1
A. H. Mahan, J. Carapella, B. P. Nelson, R. S. Crandall, I. Balberg, J. Appl. Phys. 69 (1991) 6728.
- 2
A. R. Middya, J. Guillet, R. Brenot, J. Perrin, J. E. Bouree, C. Longeaud and J. P. Kleider, Mat. Res. Soc. Symp. Proc. Vol. 467 (1997) p. 271.
- 3
U. Weber, A. R. Middya, C. Mukherjee and B. Schroeder, Proceedings of the 28th IEEE Photovoltaic Specialist Conference-2000, Anchorage, AK, p. 908.
- 4
S. Ray, A. R. Middya and A. K. Barua, Jpn. J. Appl. Phys. 32 Part 2 (Letters) (1993) L1559.
- 5
A. R. Middya, J-J. Liang and K. Ghosh, Mat. Res. Symp. Proc. Vol.862 (2005) p.183.
- 6
Penrose, Roger, U.S. Patent 4133152, 1979.
- 7
R. Zandi, D. Reguera, R. F. Bruinams, W. M. Gelbert and J. Rudnick, Proc. National Academy of Science, USA 101 (44), 15556 (2004).
- 8
P. Tsai, A. Inoue and T. Masumoto, Jpn. J. Appl. Phys. 26, L1505 (1987).
- 9
Y. Zhao, Y-H. Kim, M-H. Du and S.B. Zhang, Phys. Rev. Letts. 93, 015502-1 (2004).
- 10
A. R. Middya, J-J. Liang and K. Ghosh, J. Non-Crystalline Solids (2006) (in press).
- 11
S. B. Concari and R. H. Buitrago, Semiconductor Science and Technology 18, 864 (2003).
Author information
Affiliations
Rights and permissions
About this article
Cite this article
Middya, A.R., Liang, JJ. & Ghosh, K. Nucleation and Growth of Quasicrystalline Silicon Thin Films on Glass Substrate Synthesized by Ceramics Hot Wire Chemical Vapor Deposition. MRS Online Proceedings Library 910, 809 (2005). https://doi.org/10.1557/PROC-0910-A08-09
Received:
Accepted:
Published: