Research on Amorphous Silicon Thin-Film Structure and Growth Processes Using Nonlinear Dynamics Methods

Abstract

There proved a possibility of applying the self-organization theory to the growth of noncrystalline thin-films and to the detection of ordering in their structure. Methods of analyzing the dynamics of complex systems are modified so as to investigate the structure of noncrystalline thin films. There offered new principles of the construction of material growth control systems.

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References

  1. 1

    H.D.I. Abarbanel, R. Brrown, J.J. Sidorowich, L.S. Tsimring, Rev. of Mod. Phys. 4, 1331 (1993).

    Article  Google Scholar 

  2. 2

    A.A. Aivazov, N.V. Bodyagin, S.P. Vikhrov, S.V. Petrov, J. Non-Cryst. Solids, 114, 157 (1989).

    CAS  Article  Google Scholar 

  3. 3

    P. Grassberger, Phys. Scripta, 40, 346, (1989).

    Article  Google Scholar 

  4. 4

    L.S. Tsimring, Phys. Rev. B, 5, 3421 (1993).

    Article  Google Scholar 

  5. 5

    N.V. Bodyagin, S.P. Vikhrov, S.M. Mursalov and I.V. Tarasov, Microelectronics, 4(31), 307 (2002).

    Google Scholar 

  6. 6

    S.P. Vikhrov, N.V. Bodyagin, T.G. Larina and S.M. Mursalov, Semiconductors, 39 (8), 917 (2005).

    CAS  Article  Google Scholar 

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Bodyagin, N.V., Vikhrov, S.P., Larina, T.G. et al. Research on Amorphous Silicon Thin-Film Structure and Growth Processes Using Nonlinear Dynamics Methods. MRS Online Proceedings Library 910, 501 (2005). https://doi.org/10.1557/PROC-0910-A05-01

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