Self-assembled nano-dots of heteroepitaxial SiC on Si

Abstract

Self-assembled silicon carbide (SiC) nano-dots were fabricated on Si wafers by an organometallic ion beam deposition. The self-assembled SiC nano-dots have the shape of a tile, and were heteroepitaxial SiC on Si.

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Correspondence to Takashi Matsumoto.

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Matsumoto, T., Kiuchi, M., Sugimoto, S. et al. Self-assembled nano-dots of heteroepitaxial SiC on Si. MRS Online Proceedings Library 908, 1106 (2005). https://doi.org/10.1557/PROC-0908-OO11-06

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