Self-assembled nano-dots of heteroepitaxial SiC on Si

MRS Online Proceedings Library volume 908, Article number: 1106 (2005) Cite this article

Abstract

Self-assembled silicon carbide (SiC) nano-dots were fabricated on Si wafers by an organometallic ion beam deposition. The self-assembled SiC nano-dots have the shape of a tile, and were heteroepitaxial SiC on Si.

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References

  1. 1

    R. F. Davis, J. Cryst. Growth 137, 161 (1994).

    CAS  Article  Google Scholar 

  2. 2

    A. P. Zhang, et. al., Solid-State Electronics 47, 821 (2003).

    CAS  Article  Google Scholar 

  3. 3

    G. Benyuan, C. Coluzza and M. Mangiantini, Superlattices and Microstructures 6, 153 (1989).

    Article  Google Scholar 

  4. 4

    H. Mimura, T. Matsumoto and Y. Kanemitsu, Appl. Phys. Lett. 65, 3350 (1994).

    CAS  Article  Google Scholar 

  5. 5

    T. Matsumoto, K. Mimoto, S. Goto, M. Ohba, Y. Agawa, and M. Kiuchi, Rev. Sci. Instrum. 71, 1168 (2000).

    CAS  Article  Google Scholar 

  6. 6

    T. Matsumoto, K. Mimoto, M. Kiuchi, S. Sugimoto and S. Goto, Mat. Res. Soc. Symp. Proc. 585, 165 (2000).

    CAS  Article  Google Scholar 

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Affiliations

  1. Research Institute for Innovation in Sustainable Chemistry, National Institute of Advanced Industrial Science and Technology (AIST), 1-8-31 Midorigaoka, Ikeda, Osaka, 563-8577, Japan

    Takashi Matsumoto, Masato Kiuchi, Satoshi Sugimoto & Seiichi Goto

  2. Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka, 565-0871, Japan

    Satoshi Sugimoto & Seiichi Goto

Authors
  1. Takashi Matsumoto
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  2. Masato Kiuchi
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  3. Satoshi Sugimoto
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  4. Seiichi Goto
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Correspondence to Takashi Matsumoto.

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Matsumoto, T., Kiuchi, M., Sugimoto, S. et al. Self-assembled nano-dots of heteroepitaxial SiC on Si. MRS Online Proceedings Library 908, 1106 (2005). https://doi.org/10.1557/PROC-0908-OO11-06

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