New transparent conductors anatase Ti1−xMxO2 (M=Nb,Ta): transport and optical properties

Abstract

We have discovered new transparent conducting oxides (TCOs), anatase Ti1−xMxO2 (M=Nb,Ta), in thin film form. Both films with 0.03 ≤ x ≤ 0.06 showed resistivity of 2–3 × 10−4 Ωcm and internal transmittance of ~95% in the visible light region (40 nm in thickness), at room temperature. These values are comparable to those of typical TCOs, such as In2−xSnxO3 (ITO).

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Correspondence to Yutaka Furubayashi.

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Furubayashi, Y., Hitosugi, T., Yamamoto, Y. et al. New transparent conductors anatase Ti1−xMxO2 (M=Nb,Ta): transport and optical properties. MRS Online Proceedings Library 905, 201 (2005). https://doi.org/10.1557/PROC-0905-DD02-01

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