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New transparent conductors anatase Ti1−xMxO2 (M=Nb,Ta): transport and optical properties

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Abstract

We have discovered new transparent conducting oxides (TCOs), anatase Ti1−xMxO2 (M=Nb,Ta), in thin film form. Both films with 0.03 ≤ x ≤ 0.06 showed resistivity of 2–3 × 10−4 Ωcm and internal transmittance of ~95% in the visible light region (40 nm in thickness), at room temperature. These values are comparable to those of typical TCOs, such as In2−xSnxO3 (ITO).

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References

  1. D. S. Ginley and C. Bright, Mater. Res. Bull. 25, 15 (2000).

    Article  CAS  Google Scholar 

  2. C. A. Pan and T. P. Ma, Appl. Phys. Lett. 37, 163 (1980).

    Article  CAS  Google Scholar 

  3. I. Hamberg and C. G. Granqvist, J. Appl. Phys. 60, R123 (1986).

    Article  CAS  Google Scholar 

  4. T. Minami, Mater. Res. Bull. 25, 38 (2000).

    Article  CAS  Google Scholar 

  5. Y. Furubayashi, T. Hitosugi, Y. Yamamoto, K. Inaba, G. Kinoda, Y. Hirose, T. Shimada, and T. Hasegawa, Appl. Phys. Lett. 86, 252101 (2005).

    Article  Google Scholar 

  6. T. Hitosugi, Y. Furubayashi, A. Ueda, K. Itabashi, K. Inaba, Y. Hirose, G. Kinoda, Y. Yamamoto, T. Shimada, and T. Hasegawa, Jpn. J. Appl. Phys. 44, L1063 (2005).

    Article  CAS  Google Scholar 

  7. H. Tang, H. Berger, P. E. Schmid, F. Lévy, and G. Burri, Solid State Commun. 23, 161 (1977).

    Article  Google Scholar 

  8. H. Tang, K. Prasad, R. Sanjines, P. E. Schmid, and F. Lévy, J. Appl. Phys. 75, 2042 (1994).

    Article  CAS  Google Scholar 

  9. S. R. Taylor, and S. H. McLennan, The Continental Crust: Its Composition and Evolution, Blackwell, Oxford, p.312 (1985).

  10. R. Shannon, Acta Crystallogr. Sect. A 32, 751 (1976).

    Article  Google Scholar 

  11. Y. Shigesato, D. C. Paine, and T. E. Haynes, J. Appl. Phys. 73, 3805 (1993).

    Article  CAS  Google Scholar 

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Authors and Affiliations

  1. Kanagawa Academy of Science and Technology, 213-0012, Kawasaki, Japan

    Yutaka Furubayashi, Taro Hitosugi, Yukio Yamamoto, Yasushi Hirose, Makoto Otani, Toshihiro Shimada & Tetsuya Hasegawa

  2. Department of Chemistry, University of Tokyo, 113-0033, Tokyo, Japan

    Taro Hitosugi, Toshihiro Shimada & Tetsuya Hasegawa

  3. National Institute for Material Science, 305-0044, Tsukuba, Japan

    Kiyomi Nakajima & Toyohiro Chikyow

Authors
  1. Yutaka Furubayashi
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  2. Taro Hitosugi
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  3. Yukio Yamamoto
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  4. Yasushi Hirose
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  5. Makoto Otani
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  6. Kiyomi Nakajima
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  7. Toyohiro Chikyow
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  8. Toshihiro Shimada
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  9. Tetsuya Hasegawa
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Furubayashi, Y., Hitosugi, T., Yamamoto, Y. et al. New transparent conductors anatase Ti1−xMxO2 (M=Nb,Ta): transport and optical properties. MRS Online Proceedings Library 905, 201 (2005). https://doi.org/10.1557/PROC-0905-DD02-01

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  • DOI: https://doi.org/10.1557/PROC-0905-DD02-01

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