Pulsed laser deposition of cluster-assembled thin films with controlled nanostructure

Abstract

Thin films synthesized by assembling clusters present interesting chemical and physical properties and a large specific surface, and are appealing for functional applications (e.g. sensing and catalysis). Also, clusters supported on surfaces are interesting both for nanocatalysis applications and for fundamental research. By means of pulsed laser deposition (PLD) in a background atmosphere we can induce cluster aggregation in the ablation plume and control the deposition kinetic energy of the clusters. These phenomena depend on the plume expansion dynamics and their influence on the properties of the deposited films has been investigated as a function of the background gas mass and pressure. The control of these parameters permits variation of the film surface morphology, from a compact structure with a very smooth surface, to a film with a controlled roughness at the nanoscale, to an open, low density meso- and nanostructure characterized by a high fraction of voids and by a large specific area. Thin films of WOx, TiOx, Pd/PdO, and Ag were deposited and characterized by atomic force microscopy (AFM), scanning electron microscopy (SEM) and Raman spectroscopy. Post-deposition annealing permits control of the crystalline degree of the films, which in the case of tungsten and titanium oxide is found to depend on the original nanostructure, while a different degree of oxidation can be induced by controlling the amount of oxygen in the deposition chamber. In-situ scanning tunneling microscopy (STM) was employed to study the first stages of growth of W films on different substrates. This opens the possibility to tailor the material properties through the control of the building nano-units.

This is a preview of subscription content, access via your institution.

References

  1. [1]

    P. Jensen, Rev. Mod. Phys. 71, 1695 (1999)

    CAS  Article  Google Scholar 

  2. [2]

    D.B. Geohegan, A.A. Puretzky, G. Duscher, and S.J. Pennycook, Appl. Phys. Lett. 72, 2987 (1998)

    CAS  Article  Google Scholar 

  3. [3]

    R. Dolbec, E. Irissou, M. Chaker, D. Guay, F. Rosei, and M.A. El Khakhani, Phys. Rev. B 70, 201406 (2004)

    Article  Google Scholar 

  4. [4]

    D.H. Lowndes, C.M. Rouleau, T.G. Thundat, G. Duscher, E.A. Kenik, S.J. Pennycook, J. Mater. Res. 14, 359 (1999)

    CAS  Article  Google Scholar 

  5. [5]

    D. B. Chrisey and G. Hubler, “Pulsed Laser Deposition of Thin Films”, Wiley & Sons, New York (1994)

  6. [6]

    P.R. Willmott and J.R. Huber, Rev. Mod. Phys. 72, 315 (2000)

    CAS  Article  Google Scholar 

  7. [7]

    H. Kawasaki, J. Namba, K. Iwatsuji, Y. Suda, K. Wada, K. Ebihara, and T. Ohshima, Appl. Surf. Sci. 197–198, 547 (2002)

    Article  Google Scholar 

  8. [8]

    E. Salje and K. Viswanathan, Acta Cryst. A 31, 356 (1975)

    Article  Google Scholar 

  9. [9]

    A. Fujishima, T. N. Rao, and D. A. Tryk, J. Photochem. Photobiol. C 1, 1 (2000)

    CAS  Article  Google Scholar 

  10. [10]

    M. Gratzel, Nature 414, 338 (2001)

    CAS  Article  Google Scholar 

  11. [11]

    S. Amoruso, R. Bruzzese, N. Spinelli, R. Velotta, M. Vitiello, and X. Wang, Phys. Rev. B 67, 224503 (2003)

    Article  Google Scholar 

  12. [12]

    C.V. Budtz-Jørgensen, M.M. Mond, B. Doggett, and J.G. Lunney, J. Phys. D: Appl. Phys. 38, 1892 (2005)

    Article  Google Scholar 

  13. [13]

    X.Y. Chen, S.B. Xiong, Z.S. Sha and Z.G. Liu, Appl. Surf. Sci. 115, 279 (1997)

    CAS  Article  Google Scholar 

  14. [14]

    M. Boulova and G. Lucazeau, Journal of Solid State Chemistry 167, 423 (2002)

    Article  Google Scholar 

  15. [15]

    M. Boulova, A Gaskov, and G. Lucazeau, Sens. and Act. B 81, 99 (2001)

    CAS  Article  Google Scholar 

  16. [16]

    A.Li Bassi, D. Cattaneo, V. Russo, C.E. Bottani, E. Barborini, T. Mazza, P. Piseri, P. Milani, F.O. Ernst, K. Wegner, and S.E. Pratsinis , J. Appl. Phys. 98, 074305 (2005)

    Article  Google Scholar 

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to A. Li Bassi.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Bassi, A.L., Casari, C.S., Fonzo, F.D. et al. Pulsed laser deposition of cluster-assembled thin films with controlled nanostructure. MRS Online Proceedings Library 901, 404 (2005). https://doi.org/10.1557/PROC-0901-Ra24-04

Download citation