Nano-Thermometry: Transmission Electron Microscopy of Femtosecond Laser Irradiated Co/Si Multilayer Thin Foils

Abstract

Pre-thinned foils composed of amorphous silicon and polycrystalline cobalt were irradiated using femtosecond pulse-length lasers at fluences sufficient for ablation (material removal). The resultant ablated hole and surrounding vicinity was studied using transmission electron microscopy to determine modifications to the structure. Evidence of cobalt silicide formation was observed within a 3 micron radius of the laser hole edge by use of selected area electron diffraction (SAED). In addition, elongated grains of crystalline silicon was observed within 500 nm of the laser hole edge, indicating melting of the amorphous silicon and heat dissipation slow enough to allow recyrstallization. This initial work demonstrates the use of pre-designed nanostructured multilayer systems as a method for nanoscale profiling of heat dissipation following pulsed laser irradiation.

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Picard, Y., Yalisove, S. Nano-Thermometry: Transmission Electron Microscopy of Femtosecond Laser Irradiated Co/Si Multilayer Thin Foils. MRS Online Proceedings Library 899, 730 (2005). https://doi.org/10.1557/PROC-0899-N07-30

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