The depth distribution of residual stresses in (Ti,Al)N films: Measurement and analysis

Abstract

A method is introduced to determine the depth distribution of the residual stresses in (Ti,Al)N films. The films were gradually stripped by chemical corrosion, an optical system was designed to test the curvature change of the specimens, and the depth distribution of the residual stresses was calculated. The results show that the residual stresses increase gradually from the interface of film/substrate and reach a maximum value at the middle region, then decrease until the surface.

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Acknowledgment

This work was supported by the National Natural Science Foundation of China (Grant No. 50471072).

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Correspondence to Chao Sun.

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Zhao, SS., Du, H., Hua, WG. et al. The depth distribution of residual stresses in (Ti,Al)N films: Measurement and analysis. Journal of Materials Research 22, 2659–2662 (2007). https://doi.org/10.1557/JMR.2007.0363

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