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Oxygen transport during annealing of Pb(Zr,Ti)O3 thin films in O2 gas and its effect on their conductivity

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Abstract

Lead zirconate titanate (PZT) thin films were deposited in a reactive argon/oxygen gas mixture by radio-frequency-magnetron sputtering. The use of a metallic target allows us to control the oxygen incorporation in the PZT thin film and also, using oxygen 18 as a tracer, to study the oxygen diffusion in the thin films. Electrical properties and crystallization were optimized with a 90-nm PZT thin film grown on RuO2 electrodes. These PZT films, annealed with a very modest thermal budget (550 °C) show very low leakage current densities (J = 2 × 10−8 A/cm2 at 1 V). In this article we show that a strong correlation exists between the oxygen composition in the PZT film and the leakage current density.

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References

  1. D.K. Fork, F. Armani-Leplingard, and J.J. Kingston, MRS Bull. 21, 53 (1996).

    Article  Google Scholar 

  2. K Sreenivas and M. Sayer, J. Appl. Phys. 64, 1484 (1988).

    Article  CAS  Google Scholar 

  3. D.L. Polla and L.F. Francis, MRS Bull. 21, 59 (1996).

    Article  CAS  Google Scholar 

  4. C.V.R. Vasant Kumar, R. Pascual, and M. Sayer, J. Appl. Phys. 71, 864 (1992).

    Article  CAS  Google Scholar 

  5. R. Ramesh, W.K. Chan, B. Wilkens, H. Gilchrist, T. Sands, J.M. Tarascon, V.G. Keramidas, D.K. Fork, J. Lee, and A. Safari, Appl. Phys. Lett. 61, 1537 (1992).

    Article  Google Scholar 

  6. G.R. Fox and S.B. Krupanidhi, J. Mater. Res. 9, 699 (1994).

    Article  CAS  Google Scholar 

  7. I.K. Yoo and S.B. Desu, Mater. Sci. Eng. B13, 319 (1992).

    Article  CAS  Google Scholar 

  8. F. Ayguavives, B. Ea-Kim, B. Agius, and J. Bretagne, Appl. Phys. Lett. 73, 1023 (1998).

    Article  CAS  Google Scholar 

  9. F. Ayguavives, B. Ea-Kim, and B. Agius, Ferroelectrics 225, 229 (1999).

    Article  CAS  Google Scholar 

  10. B. Maurel, G. Amsel, and J.P. Nadai, Nucl. Instrum. Methods 218, 165 (1983).

    Article  Google Scholar 

  11. I. Vickridge and G. Amsel, Nucl. Instrum. Methods B45, 6 (1990).

    Article  Google Scholar 

  12. G. Battistig, G. Amsel, E. d’Artemare, and I. Vickridge, Nucl. Instrum. Methods B66, 1 (1992).

    Article  CAS  Google Scholar 

  13. G. Battistig, G. Amsel, E. d’Artemare, and I. Vickridge, Nucl. Instrum. Methods B61, 369 (1991).

    Article  CAS  Google Scholar 

  14. E. Cattan and B. Agius, J. Vac. Sci. Technol. A11, 2808 (1993)..

    Article  CAS  Google Scholar 

  15. J.F. Scott, C.A. Araujo, B.M. Melnick, L.D. McMillan, and R. Zuleeg, J. Appl. Phys. 70, 382 (1991).

    Article  Google Scholar 

  16. D.P. Vijay and S.B. Desu, J. Electrochem. Soc. 140, 2640 (1993).

    Article  CAS  Google Scholar 

  17. R. Dat, D.J. Lichtenwalkner, O. Auciello, and A.I. Kingon, Appl. Phys. Lett. 64, 2673 (1994).

    Article  CAS  Google Scholar 

  18. A. Magneli, Ark. Kemi 1, 213 (1949).

    Article  CAS  Google Scholar 

Download references

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Authors and Affiliations

  1. Department of Material Science and Engineering, North Carolina State University, Box 7919, 27695, Raleigh, North Carolina, USA

    F. Ayguavives

  2. Laboratoire de Physique des Gaz et des Plasmas (LPGP), Centre Universitaire, Bat 210, 91405, Orsay Cedex, France

    B. Agius

  3. Laboratoire Charles Fabry (IOTA), Centre universitaire BP 147, 91403, Orsay Cedex, France

    B. EaKim

  4. Groupe de Physique des Solides, Université Paris VII et VI, Paris, France

    I. Vickridge

Authors
  1. F. Ayguavives
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  2. B. Agius
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  3. B. EaKim
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  4. I. Vickridge
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Correspondence to F. Ayguavives.

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Ayguavives, F., Agius, B., EaKim, B. et al. Oxygen transport during annealing of Pb(Zr,Ti)O3 thin films in O2 gas and its effect on their conductivity. Journal of Materials Research 16, 3005–3008 (2001). https://doi.org/10.1557/JMR.2001.0412

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  • DOI: https://doi.org/10.1557/JMR.2001.0412

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