Oxygen transport during annealing of Pb(Zr,Ti)O3 thin films in O2 gas and its effect on their conductivity

Abstract

Lead zirconate titanate (PZT) thin films were deposited in a reactive argon/oxygen gas mixture by radio-frequency-magnetron sputtering. The use of a metallic target allows us to control the oxygen incorporation in the PZT thin film and also, using oxygen 18 as a tracer, to study the oxygen diffusion in the thin films. Electrical properties and crystallization were optimized with a 90-nm PZT thin film grown on RuO2 electrodes. These PZT films, annealed with a very modest thermal budget (550 °C) show very low leakage current densities (J = 2 × 10−8 A/cm2 at 1 V). In this article we show that a strong correlation exists between the oxygen composition in the PZT film and the leakage current density.

This is a preview of subscription content, access via your institution.

References

  1. 1

    D.K. Fork, F. Armani-Leplingard, and J.J. Kingston, MRS Bull. 21, 53 (1996).

    Article  Google Scholar 

  2. 2

    K Sreenivas and M. Sayer, J. Appl. Phys. 64, 1484 (1988).

    CAS  Article  Google Scholar 

  3. 3

    D.L. Polla and L.F. Francis, MRS Bull. 21, 59 (1996).

    CAS  Article  Google Scholar 

  4. 4

    C.V.R. Vasant Kumar, R. Pascual, and M. Sayer, J. Appl. Phys. 71, 864 (1992).

    CAS  Article  Google Scholar 

  5. 5

    R. Ramesh, W.K. Chan, B. Wilkens, H. Gilchrist, T. Sands, J.M. Tarascon, V.G. Keramidas, D.K. Fork, J. Lee, and A. Safari, Appl. Phys. Lett. 61, 1537 (1992).

    Article  Google Scholar 

  6. 6

    G.R. Fox and S.B. Krupanidhi, J. Mater. Res. 9, 699 (1994).

    CAS  Article  Google Scholar 

  7. 7

    I.K. Yoo and S.B. Desu, Mater. Sci. Eng. B13, 319 (1992).

    CAS  Article  Google Scholar 

  8. 8

    F. Ayguavives, B. Ea-Kim, B. Agius, and J. Bretagne, Appl. Phys. Lett. 73, 1023 (1998).

    CAS  Article  Google Scholar 

  9. 9

    F. Ayguavives, B. Ea-Kim, and B. Agius, Ferroelectrics 225, 229 (1999).

    CAS  Article  Google Scholar 

  10. 10

    B. Maurel, G. Amsel, and J.P. Nadai, Nucl. Instrum. Methods 218, 165 (1983).

    Article  Google Scholar 

  11. 11

    I. Vickridge and G. Amsel, Nucl. Instrum. Methods B45, 6 (1990).

    Article  Google Scholar 

  12. 12

    G. Battistig, G. Amsel, E. d’Artemare, and I. Vickridge, Nucl. Instrum. Methods B66, 1 (1992).

    CAS  Article  Google Scholar 

  13. 13

    G. Battistig, G. Amsel, E. d’Artemare, and I. Vickridge, Nucl. Instrum. Methods B61, 369 (1991).

    CAS  Article  Google Scholar 

  14. 14

    E. Cattan and B. Agius, J. Vac. Sci. Technol. A11, 2808 (1993)..

    CAS  Article  Google Scholar 

  15. 15

    J.F. Scott, C.A. Araujo, B.M. Melnick, L.D. McMillan, and R. Zuleeg, J. Appl. Phys. 70, 382 (1991).

    Article  Google Scholar 

  16. 16

    D.P. Vijay and S.B. Desu, J. Electrochem. Soc. 140, 2640 (1993).

    CAS  Article  Google Scholar 

  17. 17

    R. Dat, D.J. Lichtenwalkner, O. Auciello, and A.I. Kingon, Appl. Phys. Lett. 64, 2673 (1994).

    CAS  Article  Google Scholar 

  18. 18

    A. Magneli, Ark. Kemi 1, 213 (1949).

    CAS  Article  Google Scholar 

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to F. Ayguavives.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Ayguavives, F., Agius, B., EaKim, B. et al. Oxygen transport during annealing of Pb(Zr,Ti)O3 thin films in O2 gas and its effect on their conductivity. Journal of Materials Research 16, 3005–3008 (2001). https://doi.org/10.1557/JMR.2001.0412

Download citation