Ultraviolet laser-induced liquid-phase palladium seeding on polymers


Excimer laser pulses with wavelength of 308 nm, repetition rates of 1–10 Hz, pulse energies of 300–400 mJ, and pulse width of 20 ns are used to selectively seed palladium aggregates from a liquid-phase solution on polymer (polyimide) surfaces. The precursors used are PdCl2 in hydrochloric acid and Pd(CH3CO2)2 in acetic acid. The coverage of the polyimide with palladium aggregates is determined by the analysis of scanning electron microscopy measurements. Qualitative and quantitative analyses of seeded particles on polyimide (PI) are investigated by x-ray diffraction and transmission measurements. The amount of deposited palladium showed a quadratic dependence on the laser fluence reaching the surface. On the other hand, the coverage versus number of laser shots shows a square-root-like dependence. The palladium deposits also appear as amorphous and Pd[111] crystallites forms depending on the number of laser pulses. The roughness of a PI surface prior to seeding is modified mechanically and characterized by its fractal dimension. The fractal dimension of the samples varies between 2.3 and 2.7 for all the parameters applied, and the palladium deposition is found to be dependent on this dimension of the PI film.

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  1. 1.

    D. Ehrlich and J.Y. Tsao, VLSI Electronics: Microstructure Science (Academic Press, New York, 1983), Vol. 7.

  2. 2.

    L. Nánai, I. Hevesi, F.V. Bunkin, B.S. Luk’yanchuk, M.K. Brook, and G.A. Shafeev, in Proceedings of the Third International Symposium on Modern Optics (Budapest, 1988), Vol. 2, pp. 469–472.

  3. 3.

    Y-F. Lu, M. Takai, T. Nakata, S. Nagatomo, and S. Namba, Appl. Phys. A 52, 129 (1991).

    Article  Google Scholar 

  4. 4.

    Y-F. Lu, S.M. Huang, X.B. Wang, and Z.X. Shen, Appl. Phys. A 66, 543 (1998).

    CAS  Article  Google Scholar 

  5. 5.

    P. Heszler, J.O. Carlsson, and P. Mogyorósi, J. Vac. Sci. Technol., A 11, 2924 (1993).

    CAS  Google Scholar 

  6. 6.

    K. Bali, Zs. Geretovszky, A.L. Tóth, and T. Szörényi, Appl. Surf. Sci. 69, 326 (1993).

    CAS  Article  Google Scholar 

  7. 7.

    J. Bohandy, B.F. Kim, and F.J. Adrian, J. Appl. Phys. 60, 1538 (1986).

    CAS  Article  Google Scholar 

  8. 8.

    Z. Tóth, T. Szörényi, and A.L. Tóth, Appl. Surf. Sci. 69, 317 (1993).

    Article  Google Scholar 

  9. 9.

    H. Moilanen, J. Remes, and S. Leppävuori, Phys. Scr. T69, 237 (1997).

    CAS  Article  Google Scholar 

  10. 10.

    A.G. Schrott, B. Braren, E.J.M. O’Sullivan, R.F. Saraf, P. Bailey, and J. Roldan, J. Electrochem. Soc. 142, 944 (1995).

    CAS  Article  Google Scholar 

  11. 11.

    K.G. Mishra and R.K. Paramguru, J. Electrochem. Soc. 143, 510 (1996).

    CAS  Article  Google Scholar 

  12. 12.

    P. Bindra and J. Roldan, J. Electrochem. Soc. 132, 2581 (1985).

    CAS  Article  Google Scholar 

  13. 13.

    H. Esrom, J-Y. Zhang, U. Kogelschatz, and A.J. Pedraza, Appl. Surf. Sci. 86, 202 (1995).

    CAS  Article  Google Scholar 

  14. 14.

    H. Niino and A. Yabe, Appl. Phys. Lett. 60, 2697 (1992).

    CAS  Article  Google Scholar 

  15. 15.

    T.J. Hirsch, R.F. Miracky, and C. Lin, Appl. Phys. Lett. 57, 1357 (1990).

    CAS  Article  Google Scholar 

  16. 16.

    N. Almquist, Surf. Sci. 355, 221 (1996).

    Article  Google Scholar 

  17. 17.

    H. Ehrenreich and D. Turnbull, Solid State Physics (Academic Press, New York, 1986), Vol. 39, pp. 219–227.

  18. 18.

    J.M. Gómez-Rodriguez, A.M. Baró, L. Vázquez, R.C. Salvarezza, J.M. Varam, and A.J. Arvia, J. Phys. Chem. 96, 347 (1992).

    Article  Google Scholar 

  19. 19.

    Cs. Beleznai, R. Vajtai and L. Nánai, Fractals 5, 275 (1997).

    CAS  Article  Google Scholar 

  20. 20.

    J. Békési, K. Kordás, Cs. Beleznai, K. Bali, R. Vajtai, and L. Nánai, Appl. Surf. Sci. 138–139, 614 (1999).

    Google Scholar 

  21. 21.

    J.C. Russ and J.C. Russ, in Microbeam Analysis (San Francisco Press, 1986), p. 509.

  22. 22.

    J.C. Russ and J.C. Russ, Proceedings of EMSA (San Francisco Press, 1987), pp. 540–543.

  23. 23.

    J.C. Russ, Computer-Assisted Microscopy (Plenum Press, New York, 1990), pp. 331–343.

  24. 24.

    P. Karrer, Lehrbuch der Organischen Chemie (Georg Thieme, Leipzig, 1950), Vol. 4, pp. 91–135.

  25. 25.

    J. McMurry, Fundamentals of Organic Chemistry, 3rd ed. (Brooks/Cole Publishing Co. Pacific Grove, California, 1994).

  26. 26.

    G. Xomeritakis and Y-S. Lin, AIChE J. 44, 174 (1998).

    CAS  Article  Google Scholar 

  27. 27.

    S. Yan, H. Maeda, K. Kusakabe, and S. Morooka, Ind. Eng. Chem. Res. 33, 616 (1994).

    CAS  Article  Google Scholar 

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Kordás, K., Békési, J., Bali, K. et al. Ultraviolet laser-induced liquid-phase palladium seeding on polymers. Journal of Materials Research 14, 3690–3694 (1999). https://doi.org/10.1557/JMR.1999.0498

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