Preparation of epitaxial BaTiO3 thin films by the dipping-pyrolysis process

Abstract

Epitaxial BaTiO3 thin films were prepared on SrTiO3 (100) substrates by the dipping-pyrolysis process using metal naphthenates as starting materials. Highly oriented BaTiO3 thin films were crystallized by heat treatment at 800 °C and higher, from amorphous precursor films pyrolyzed at 470 °C. XRD pole-figure and reciprocal-space mapping analyses showed that the films were epitaxially grown on SrTiO3 substrates and were pseudocubic phase with an a||/a ratio of 1.003, smaller than the c0/a0 ratio (=1.011) of bulk tetragonal BaTiO3.

This is a preview of subscription content, access via your institution.

References

  1. 1.

    L. A. Wills, B. W. Wessels, D. S. Richeson, and T. J. Marks, Appl. Phys. Lett. 60, 41 (1992).

    CAS  Article  Google Scholar 

  2. 2.

    K. Nashimoto, D. K. Fork, and T. H. Geballe, Appl. Phys. Lett. 60, 1199 (1992).

    CAS  Article  Google Scholar 

  3. 3.

    H. Terauchi, Y. Watanabe, H. Kasatani, K. Kamigaki, Y. Yano, T. Terashima, and Y. Bando, J. Phys. Soc. Jpn. 61, 2194 (1992).

    CAS  Article  Google Scholar 

  4. 4.

    J. Gong, M. Kawasaki, K. Fujito, U. Tanaka, N. Ishizawa, M. Yoshimoto, H. Koinuma, M. Kumagai, K. Hirai, and K. Horiguchi, Jpn. J. Appl. Phys. 32, L687 (1993).

    CAS  Article  Google Scholar 

  5. 5.

    W. O. Benomar, S. S. Xue, R. A. Lessard, A. Singh, Z. L. Wu, and P. K. Kuo, J. Mater. Res. 9, 970 (1994).

    Article  Google Scholar 

  6. 6.

    E. Shi, C. R. Cho, M. S. Jang, S. Y. Jeong, and H. J. Kim, J. Mater. Res. 9, 2914 (1994).

    CAS  Article  Google Scholar 

  7. 7.

    M. Matsuoka, K. Hoshino, and K. Ono, J. Appl. Phys. 76, 1768 (1994).

    Article  Google Scholar 

  8. 8.

    T. W. Kim and S. S. Yom, Appl. Phys. Lett. 65, 1955 (1994).

    CAS  Article  Google Scholar 

  9. 9.

    T. Nose, H-T. Kim, and H. Uwe, Jpn. J. Appl. Phys. 33, 5259 (1994).

    CAS  Article  Google Scholar 

  10. 10.

    V. Srikant, E. J. Tarsa, D. R. Clarke, and J. S. Speck, J. Appl. Phys. 77, 1517 (1995).

    CAS  Article  Google Scholar 

  11. 11.

    S. Kim, S. Hishita, Y. M. Kang, and S. Baik, J. Appl. Phys. 78, 5604 (1996).

    Article  Google Scholar 

  12. 12.

    D. L. Kaiser, M. D. Vaudin, L. D. Lotter, Z. L. Wang, J. P. Cline, C. S. Hwang, R. B. Marinenko, and J. G. Gillen, Appl. Phys. Lett. 66, 2801 (1995).

    CAS  Article  Google Scholar 

  13. 13.

    Z. A. Burhanuddin, M. S. Tomar, and E. Dayalan, Thin Solid Films 253, 53 (1994).

    CAS  Article  Google Scholar 

  14. 14.

    C-J. Peng and S. B. Krupanidhi, J. Mater. Res. 10, 708 (1995).

    CAS  Article  Google Scholar 

  15. 15.

    C. S. Hwang, S. O. Park, H-J. Cho, C. S. Kang, H-K. Kang, S. I. Lee, and M. Y. Lee, Appl. Phys. Lett. 67, 2819 (1995).

    CAS  Article  Google Scholar 

  16. 16.

    Y-F. Chen, L. Sun, T. Yu, J-X. Chen, Y-Y. Zhu, N-B. Ming, X-Y. Chen, and Z-G. Liu, Thin Solid Films 269, 18 (1995).

    CAS  Article  Google Scholar 

  17. 17.

    A. Seifert, F. F. Lange, and J. S. Speck, J. Mater. Res. 10, 680 (1995).

    CAS  Article  Google Scholar 

  18. 18.

    A. Masuda, Y. Yamanaka, M. Tazoe, T. Nakamura, A. Morimoto, and T. Shimizu, J. Cryst. Growth 158, 84 (1996).

  19. 19.

    S. Kim, T. Manabe, I. Yamaguchi, T. Kumagai, and S. Mizuta, in Proc. 1996 MRS-J Symposium (in press).

  20. 20.

    Y. S. Touloukian, Thermophysical Properties of Matter (IFI/Plenum, New York, 1977), Vol. 13, pp. 554 and 570.

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to S. Kim.

Rights and permissions

Reprints and Permissions

About this article

Verify currency and authenticity via CrossMark

Cite this article

Kim, S., Manabe, T., Yamaguchi, I. et al. Preparation of epitaxial BaTiO3 thin films by the dipping-pyrolysis process. Journal of Materials Research 12, 1141–1144 (1997). https://doi.org/10.1557/JMR.1997.0157

Download citation