Preparation of ultrafine tungsten carbide powder by CVD method from WCl6–C2H2–H2 mixtures


The synthesis of ultrafine tungsten carbide powder from WCl6–C2H2-H2 mixtures was investigated. Under most experimental conditions, a mixture of α–WC and β–W2C was produced. The specific surface area and morphology of the product prepared under various reaction conditions were determined. The product particle size increased with temperature up to 1373 K and then decreased, went through a minimum with increasing WCl6 partial pressure, and decreased with increasing H2 flow rate. The specific surface area of the product showed the opposite trend in all cases.

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Correspondence to Chang-Whan Won.

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Won, CW., Chun, BS. & Sohn, H.Y. Preparation of ultrafine tungsten carbide powder by CVD method from WCl6–C2H2–H2 mixtures. Journal of Materials Research 8, 2702–2708 (1993).

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